Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification fo...Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps： the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test resuhs are given.展开更多
The scope of the paper is the design of a fluid machinery with a multiphysics procedure, through CAD （computer-aided design）-CAE （computer-aided engineering）-CAx （computer-aided technologies） tools. The study of...The scope of the paper is the design of a fluid machinery with a multiphysics procedure, through CAD （computer-aided design）-CAE （computer-aided engineering）-CAx （computer-aided technologies） tools. The study of a wind turbine is a perfect example of a project that requires an interdisciplinary team design, in fact for such a project mechanical structure, and CFD （computational fluid dynamics） designers are necessary. In addition, in the last years, the multi domain design has been supported by the continuous development of software for computer-aided design and the unceasing increase of the connection between performances and computer costs： the final aim is to propose the instruments that assist the designer throughout all the steps of the project. The multi domain design, illustrated in this article, is based on how to design the wind turbine, and it is not about process management and manufacturability. In particular, in the article, the emphasis will be placed on the integration between CAD and mathematical software of general type and on the CAD-CAE integration.展开更多
基金Project supported by the National Natural Science Foundation of China (Nos. 60273057 and 60403049) and the National Basic Re-search Program (973) of China (No. 2002CB312106)
文摘Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps： the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test resuhs are given.
文摘The scope of the paper is the design of a fluid machinery with a multiphysics procedure, through CAD （computer-aided design）-CAE （computer-aided engineering）-CAx （computer-aided technologies） tools. The study of a wind turbine is a perfect example of a project that requires an interdisciplinary team design, in fact for such a project mechanical structure, and CFD （computational fluid dynamics） designers are necessary. In addition, in the last years, the multi domain design has been supported by the continuous development of software for computer-aided design and the unceasing increase of the connection between performances and computer costs： the final aim is to propose the instruments that assist the designer throughout all the steps of the project. The multi domain design, illustrated in this article, is based on how to design the wind turbine, and it is not about process management and manufacturability. In particular, in the article, the emphasis will be placed on the integration between CAD and mathematical software of general type and on the CAD-CAE integration.
