The optimization of electrolytes and the material removal mechanisms for Cu electrochemical mechanical planarization(ECMP)at different pH values including 5-methyl-1H-benzotriazole(TTA),hydroxyethylidenediphosphoric a...The optimization of electrolytes and the material removal mechanisms for Cu electrochemical mechanical planarization(ECMP)at different pH values including 5-methyl-1H-benzotriazole(TTA),hydroxyethylidenediphosphoric acid(HEDP),and tribasic ammonium citrate(TAC)were investigated by electrochemical techniques,X-ray photoelectron spectrometer(XPS)analysis,nano-scratch tests,AFM measurements,and polishing of Cu-coated blanket wafers.The experimental results show that the planarization efficiency and the surface quality after ECMP obtained in alkali-based solutions are superior to that in acidic-based solutions,especially at pH=8.The optimal electrolyte compositions(mass fraction)are 6% HEDP,0.3% TTA and 3% TAC at pH=8.The main factor affecting the thickness of the oxide layer formed during ECMP process is the applied potential.The soft layer formation is a major mechanism for electrochemical enhanced mechanical abrasion.The surface topography evolution before and after electrochemical polishing(ECP)illustrates the mechanism of mechanical abrasion accelerating electrochemical dissolution,that is,the residual stress caused by the mechanical wear enhances the electrochemical dissolution rate.This understanding is beneficial for optimization of ECMP processes.展开更多
An ODS （oxide dispersion strengthened） steels are one of the most notable structural materials being developed for future high-temperature energy production technologies, and several studies have been devoted to the...An ODS （oxide dispersion strengthened） steels are one of the most notable structural materials being developed for future high-temperature energy production technologies, and several studies have been devoted to the development of ODS materials for such applications. However, only little paper focuses on corrosion behavior of F/M （ferritic martensictic） and ODS steels. The corrosion behavior of 11% Cr F/M steel and 15% Cr ODS steel were evaluated using electrochemical methods in borate buffer and 1 kmol m＂3 HNO3 with or without NaCI and also in boiling 60% nitric acid. The corrosion resistance results clearly indicated the influences of steel alloys composition and chloride ions. The XPS （X-ray photo-electron spectroscopy） results of the pre-passivated surface revealed that the oxide formed were composed predominantly of Fe203 along with Cr203, and Y203 layers in ODS steel. The corrosion rate measured in boiling nitric acid for 48 h for both the steels shows high corrosion rate in boiling condition. The SEM （scanning electron microscopy） observation of the pit morphology after corrosion tests appears with shallow pit in both steel surfaces The corrosion degradation behavior in relation to the composition of the passive oxide film in different electrolytic solutions is discussed in this paper.展开更多
The proton spectral and angular distributions simultaneously within the target normal direction and laser propagation direction by using an angle-resolved proton energy spectrometer are studied.For the protons generat...The proton spectral and angular distributions simultaneously within the target normal direction and laser propagation direction by using an angle-resolved proton energy spectrometer are studied.For the protons generated in the interactions of 100 fs,800nm laser pulses with aluminum foil targets,the deviations of proton beam centers of different energies from the target normal direction towards the laser propagation direction are different.This is probably because of the toroidal magnetic fields generated at the rear target surface,which deflect protons transversely.As a result,protons in low energy range have large deviation angles,protons in middle energy range have the smallest deviation angles,while protons in high energy tail have large deviation angles.展开更多
基金Project(50975058)supported by the National Science Foundation of China
文摘The optimization of electrolytes and the material removal mechanisms for Cu electrochemical mechanical planarization(ECMP)at different pH values including 5-methyl-1H-benzotriazole(TTA),hydroxyethylidenediphosphoric acid(HEDP),and tribasic ammonium citrate(TAC)were investigated by electrochemical techniques,X-ray photoelectron spectrometer(XPS)analysis,nano-scratch tests,AFM measurements,and polishing of Cu-coated blanket wafers.The experimental results show that the planarization efficiency and the surface quality after ECMP obtained in alkali-based solutions are superior to that in acidic-based solutions,especially at pH=8.The optimal electrolyte compositions(mass fraction)are 6% HEDP,0.3% TTA and 3% TAC at pH=8.The main factor affecting the thickness of the oxide layer formed during ECMP process is the applied potential.The soft layer formation is a major mechanism for electrochemical enhanced mechanical abrasion.The surface topography evolution before and after electrochemical polishing(ECP)illustrates the mechanism of mechanical abrasion accelerating electrochemical dissolution,that is,the residual stress caused by the mechanical wear enhances the electrochemical dissolution rate.This understanding is beneficial for optimization of ECMP processes.
文摘An ODS （oxide dispersion strengthened） steels are one of the most notable structural materials being developed for future high-temperature energy production technologies, and several studies have been devoted to the development of ODS materials for such applications. However, only little paper focuses on corrosion behavior of F/M （ferritic martensictic） and ODS steels. The corrosion behavior of 11% Cr F/M steel and 15% Cr ODS steel were evaluated using electrochemical methods in borate buffer and 1 kmol m＂3 HNO3 with or without NaCI and also in boiling 60% nitric acid. The corrosion resistance results clearly indicated the influences of steel alloys composition and chloride ions. The XPS （X-ray photo-electron spectroscopy） results of the pre-passivated surface revealed that the oxide formed were composed predominantly of Fe203 along with Cr203, and Y203 layers in ODS steel. The corrosion rate measured in boiling nitric acid for 48 h for both the steels shows high corrosion rate in boiling condition. The SEM （scanning electron microscopy） observation of the pit morphology after corrosion tests appears with shallow pit in both steel surfaces The corrosion degradation behavior in relation to the composition of the passive oxide film in different electrolytic solutions is discussed in this paper.
基金supported by the National Basic Research Program of China(Grant No.2013CBA01501)the National Natural Science Foundation of China(Grant Nos.11375262 and 11135012)
文摘The proton spectral and angular distributions simultaneously within the target normal direction and laser propagation direction by using an angle-resolved proton energy spectrometer are studied.For the protons generated in the interactions of 100 fs,800nm laser pulses with aluminum foil targets,the deviations of proton beam centers of different energies from the target normal direction towards the laser propagation direction are different.This is probably because of the toroidal magnetic fields generated at the rear target surface,which deflect protons transversely.As a result,protons in low energy range have large deviation angles,protons in middle energy range have the smallest deviation angles,while protons in high energy tail have large deviation angles.
