A 4.13 MHz reference oscillator incorporating a capacitive single-crystal-silicon （SCS） micromechanical resonator is presented. The microresonator is fabricated using a cavity silicon-on-insulator （cavity-SOl） pro...A 4.13 MHz reference oscillator incorporating a capacitive single-crystal-silicon （SCS） micromechanical resonator is presented. The microresonator is fabricated using a cavity silicon-on-insulator （cavity-SOl） process and is excited in the Lain6 mode with electrostatic driving and capacitive sensing. The Lam6 mode may be described as a square plate that is cont- racting along one axis in the fabrication plane, while simultaneously extending along an orthogonal axis in the same plane. The microresonator exhibits a quality factor as high as 1.4 × 10^6 and a resonant frequency of 4.13 MHz at a pressure of 0.08 mbar. The output spectrum of the oscillator shows that the silicon micromechanical resonator is adapted as a timing element for a precision oscillator.展开更多
文摘A 4.13 MHz reference oscillator incorporating a capacitive single-crystal-silicon （SCS） micromechanical resonator is presented. The microresonator is fabricated using a cavity silicon-on-insulator （cavity-SOl） process and is excited in the Lain6 mode with electrostatic driving and capacitive sensing. The Lam6 mode may be described as a square plate that is cont- racting along one axis in the fabrication plane, while simultaneously extending along an orthogonal axis in the same plane. The microresonator exhibits a quality factor as high as 1.4 × 10^6 and a resonant frequency of 4.13 MHz at a pressure of 0.08 mbar. The output spectrum of the oscillator shows that the silicon micromechanical resonator is adapted as a timing element for a precision oscillator.
