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PECVD-MgO超导缓冲层的制备及其性质 被引量:1
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作者 赵玉文 Harald Suhr 《太阳能学报》 EI CAS CSCD 北大核心 1993年第3期233-238,共6页
超导技术是开发新能源的重要技术之一。超导缓冲层是超导薄膜的重要组成部分。以有机镁[Mg(thd)_2]为起始物,采用等离子强化化学气相沉积(PECVD)工艺,在玻璃、石英、不锈钢和镍衬底上制备了超导缓冲层MgO薄膜,当衬底温度≥400℃时,MgO... 超导技术是开发新能源的重要技术之一。超导缓冲层是超导薄膜的重要组成部分。以有机镁[Mg(thd)_2]为起始物,采用等离子强化化学气相沉积(PECVD)工艺,在玻璃、石英、不锈钢和镍衬底上制备了超导缓冲层MgO薄膜,当衬底温度≥400℃时,MgO薄膜为单一(100)晶向,具有理想的表面织构。研究了实验参数,包括射频功率和自偏压对沉积速率和薄膜性能的影响。 展开更多
关键词 等离子强化化学气相沉积 超导缓冲层 氧化镁薄膜 超导技术
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Preparation of YBa_2Cu_3O_(7-δ) superconducting thick film on Ni-W tapes via electrophoretic deposition
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作者 罗清威 李英楠 +1 位作者 李凤华 樊占国 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第1期120-125,共6页
The preparation of La0.4Sr0.6TiO3 (LSTO) buffer layer and YBa2Cu3O7-δ(YBCO) superconducting thick film by a low cost technology was studied. The crystal orientation of LSTO and YBCO films was detected by X-ray di... The preparation of La0.4Sr0.6TiO3 (LSTO) buffer layer and YBa2Cu3O7-δ(YBCO) superconducting thick film by a low cost technology was studied. The crystal orientation of LSTO and YBCO films was detected by X-ray diffraction, the conductivity of LSTO film and superconductivity of YBCO coating were investigated by standard four-probe method. Excellent in-plane alignment, smooth and dense LSTO buffer layer was successfully prepared on textured Ni-W taps by metal organic deposition (MOD). YBCO thick film was fabricated by electrophoretic deposition (EPD). The effects of applied voltage and deposition time on the YBCO coatings properties were studied. The results show that the critical current density of the YBCO coating deposited under 138 V for 35 min was about 600 A/cm2 (0 T, 77 K). 展开更多
关键词 YBCO conductive buffer layer YBCO superconducting thick film electrophoretic deposition
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