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光学法检测超精加工面表面粗糙度的新进展 被引量:1
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作者 杨国成 《光电子技术与信息》 2001年第4期43-45,共3页
本文针对超精加工面的测量特点,介绍近年来光学法检测表面粗糙度的进展。
关键词 光学法 测量 粗糙度 超精加工面
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Ultra-precision machining of reflector array for laser diode beam shaping 被引量:4
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作者 FANG F. Z. XIONG Z. HU X. T. 《Optoelectronics Letters》 EI 2007年第2期141-143,共3页
Ultra-precision machining is an effective approach to achieve high dimension accuracy and surface finish required in optical and laser components. An extensive study using a two-axis diamond turning machine is conduct... Ultra-precision machining is an effective approach to achieve high dimension accuracy and surface finish required in optical and laser components. An extensive study using a two-axis diamond turning machine is conducted to machine the reflector arrays used for laser diode beam shaping. To position the workpiece precisely, theoretical analysis is made so that the dimensional accuracy can be achieved. Investigations into machining burr reduction are carried out. With the process developed, reflectors with optical surface finish of 8 nm in Ra and minimized burr size of less than 0.5 μm have been achieved. 展开更多
关键词 激光二极管射束成形 反射镜阵列 精密机械加工 光洁度
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Determination of efficient superfinishing conditions for mirror surface finishing of titanium 被引量:2
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作者 KIM Jin-seob LIM Eun-seong JUNG Yoon-gyo 《Journal of Central South University》 SCIE EI CAS 2012年第1期155-162,共8页
To determine mirror surface finishing conditions and efficient and economical superfinishing conditions for pure titanium and titanium alloys, an abrasive film is used when superfinishing is performed under varying co... To determine mirror surface finishing conditions and efficient and economical superfinishing conditions for pure titanium and titanium alloys, an abrasive film is used when superfinishing is performed under varying conditions. These conditions include the workpiece rotation speed, the oscillation speed, the contact pressure of the roller, the hardness of the roller, and the type of abrasive film. The superfinishing device is applied to polishing a thin and long cylindrical bar. A micro-finishing film and a lapping film were used as abrasive films. A1203 grains or SiC grains were used as abrasives. The surface roughness of a polished workpiece was measured using a stylus-type surface-roughness measuring instrument. As a result, the conditions to improve the polishing surface efficiently include high values for the workpiece rotation speed, oscillation speed and contact pressure. The roller hardness has no effect on the efficient polishing conditions. The mirror finish of a surface can be created using lapping film of 3 μm with Al2O3 grains after polishing to a steady surface roughness under the efficient polishing conditions. 展开更多
关键词 SUPERFINISHING mirror surface finishing abrasive film surface roughness TITANIUM optimal polishing time
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Investigation on the cleaning of KDP ultra-precision surface polished with micro water dissolution machining principle 被引量:2
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作者 CHEN YuChuan GAO Hang +2 位作者 WANG Xu GUO DongMing TENG XiaoJi 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2017年第1期27-35,共9页
A potassium dihydrogen phosphate(KDP) optical crystal was machined to an ultra-precision surface with water-in-oil(W/O) micro emulsion polishing fluid. The micro water dissolution principle utilized in the machining p... A potassium dihydrogen phosphate(KDP) optical crystal was machined to an ultra-precision surface with water-in-oil(W/O) micro emulsion polishing fluid. The micro water dissolution principle utilized in the machining process is discussed, its planarization mechanism is illustrated, and an ultra-precision polished surface with 2.205 nm RMS roughness is obtained. However, a substantial quantity of residual contamination remained on the polished surface after machining. This can seriously impact the optical performance of the crystal, and so it must be removed. Fourier transform infrared(FTIR) spectroscopy was used to conduct an investigation into the composition of the surface residue, and the results showed that the residue was comprised of organic chemicals with hydrocarbon chains and aromatic ether, i.e., mostly the polishing fluid. The cleaning method and the principle on which the KDP ultra precision surface investigation is based are discussed in detail, and the cleaning experiments with selected KDP-compatible organic solvents were then performed. FTIR transmittance spectra measurement and microscopic observations were employed to assess the effects of the cleaning process on the surface of the KDP crystal. The results showed that toluene cleaning achieved the most desirable results. This cleaning method produced a surface roughness of 1.826 nm RMS, which allows the KDP crystal to be applied to subsequent engineering applications. 展开更多
关键词 KDP optical crystal micro water dissolution machining micro emulsion fluid ultra-precision surface FTIR spectra surface residue CLEANING
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