赴德引进“带凸度滚子超精技术与设备”见闻

获悉瓦房店轴承集团公司近年曾派人员赴德国考察,编者特约该公司王江山同志根据考察人员的回忆及相关材料将此次考察见闻做一整理,现推荐给广大读者,以便开拓技术工作者的视野及在工作中一些有益的启发。

Queensgate纳米工作台的关键技术

纳米工作台在纳米技术领域、超大规模集成电路制造和超精密工程中有着广泛的应用前景。现重点介绍Queensgate纳米工作台的关键技术 ,并对其相关的理论问题。

Ultra-precision alignment technique based on modified Moiré signals

A novel method for automatic ultra-precision alignment is presented.This method relies on the modified Moiré technique,and alignment marks are used in the form of gratings.The modified Moiré technique can effectively improve detecting sensitivity of signals and simplify the control system by using only one pair of laser-Moiré sensors.We present the mathematical model and simulation results of diffracting two gratings.The effect of various parameters on Moiré signals is studied theoretically and experimentally,and the results are found to be consistent.A computer controlled alignment device using one pair of Moiré sensors is designed.The device can achieve a fully automatic precision alignment by the modified Moiré signal.The experimental result shows that the alignment device can obtain the resolution of 5 nm and the positioning accuracy of ±0 5 μm.

变频向超精研抛技术

变频向超精研抛技木具有极高的运动平稳性,是新式高级超精加工技术。它改变传统超精加工的高频直线往复运动,逐渐变化振动频率方向,成为一种特殊的旋摆运动,具有经纬网纹高度均匀细密性及最佳光整加工轨迹。传统研磨轨迹是正弦曲线、周摆线、内摆线和外摆线轨迹。本技术加工轨迹是在作长幅次摆线为母轨迹上,又沿母轨迹作另一种长幅次摆线的子轨迹的复杂轨迹运动。加工质量比传统研磨加工质量高,加工效率也比传统研磨高15～60倍。此外,还具有光泽反射率低、无塌边、柔和优美的低表面粗糙度(Ra0.008μm)等特点。