Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification fo...Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps： the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test resuhs are given.展开更多
Laser-assisted machining has been considered as a new alternative machining method of difficult-to-cut materials. A laser module with one-axis manipulator is developed to focus on preheating laser beam effectively. Fi...Laser-assisted machining has been considered as a new alternative machining method of difficult-to-cut materials. A laser module with one-axis manipulator is developed to focus on preheating laser beam effectively. First of all, the thermal characteristic analysis was performed to verify the importance of laser module location. Laser module should be moved within 1 mm. Analysis conditions of three positions in driving range of the one-axis manipulator are selected. And a C coupling is used as a connection device for spindle and laser module. An initial model has one C coupling, and the number of C coupling has been increased from 1 to 2 in an improved model. And the analysis is carried out again for the one-axis manipulator. The results of the static analysis, the maximum displacement and the maximum stress are decreased by 22% and 11%, respectively, for the improved model when the laser module is located at farthest away from the spindle unit. As a result of the modal analysis, the first natural frequency mode is increased by 13%, 18% and 12% at these positions of the improved model, respectively. The harmonic analysis of the improved model was performed by analyzing the results of the modal analysis. The maximum deformation was 0.33 mm in driving unit at 222 Hz. And the maximum compliance of the ISO axis direction was 0.23 mm/N. Finally, the one-axis manipulator has been fabricated successfully using the analysis result.展开更多
Sacrificial multi-piece molds can be used for producing complex parts. To obtain the optimal design of molds automatically, a multi-objective optimal approach is proposed. Mold pieces number, material utilization and ...Sacrificial multi-piece molds can be used for producing complex parts. To obtain the optimal design of molds automatically, a multi-objective optimal approach is proposed. Mold pieces number, material utilization and partitioning area are taken as the objective functions, and the machinability of each mold piece is taken as constraint condition. Genetic algorithm (GA) is adopted to realize global optimization of partitioning process. Each mold piece in optimal scheme can be manufactured by milling and drilling operations, which reduce the tooling cost and shorten product cycle obviously. Using the proposed approach, mold design can be significantly automated for making complex parts.展开更多
基金Project supported by the National Natural Science Foundation of China (Nos. 60273057 and 60403049) and the National Basic Re-search Program (973) of China (No. 2002CB312106)
文摘Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps： the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test resuhs are given.
基金Project(2012-0005688) supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea Government (MEST)
文摘Laser-assisted machining has been considered as a new alternative machining method of difficult-to-cut materials. A laser module with one-axis manipulator is developed to focus on preheating laser beam effectively. First of all, the thermal characteristic analysis was performed to verify the importance of laser module location. Laser module should be moved within 1 mm. Analysis conditions of three positions in driving range of the one-axis manipulator are selected. And a C coupling is used as a connection device for spindle and laser module. An initial model has one C coupling, and the number of C coupling has been increased from 1 to 2 in an improved model. And the analysis is carried out again for the one-axis manipulator. The results of the static analysis, the maximum displacement and the maximum stress are decreased by 22% and 11%, respectively, for the improved model when the laser module is located at farthest away from the spindle unit. As a result of the modal analysis, the first natural frequency mode is increased by 13%, 18% and 12% at these positions of the improved model, respectively. The harmonic analysis of the improved model was performed by analyzing the results of the modal analysis. The maximum deformation was 0.33 mm in driving unit at 222 Hz. And the maximum compliance of the ISO axis direction was 0.23 mm/N. Finally, the one-axis manipulator has been fabricated successfully using the analysis result.
文摘Sacrificial multi-piece molds can be used for producing complex parts. To obtain the optimal design of molds automatically, a multi-objective optimal approach is proposed. Mold pieces number, material utilization and partitioning area are taken as the objective functions, and the machinability of each mold piece is taken as constraint condition. Genetic algorithm (GA) is adopted to realize global optimization of partitioning process. Each mold piece in optimal scheme can be manufactured by milling and drilling operations, which reduce the tooling cost and shorten product cycle obviously. Using the proposed approach, mold design can be significantly automated for making complex parts.
