A combined conduction and radiation heat transfer model was used to simulate the heat transfer within wafer and investigate the effect of thermal transport properties on temperature non-uniformity within wafer surface...A combined conduction and radiation heat transfer model was used to simulate the heat transfer within wafer and investigate the effect of thermal transport properties on temperature non-uniformity within wafer surface. It is found that the increased conductivities in both doped and undoped regions help reduce the temperature difference across the wafer surface. However, the doped layer conductivity has little effect on the overall temperature distribution and difference. The temperature level and difference on the top surface drop suddenly when absorption coefficient changes from 104 to 103 m-1. When the absorption coefficient is less or equal to 103 m-1, the temperature level and difference do not change much. The emissivity has the dominant effect on the top surface temperature level and difference. Higher surface emissivity can easily increase the temperature level of the wafer surface. After using the improved property data, the overall temperature level reduces by about 200 K from the basis case. The results will help improve the current understanding of the energy transport in the rapid thermal processing and the wafer temperature monitor and control level.展开更多
Active microwave remote sensing data were used to calculate the near-surface soil moisture in the vegetated areas.In this study,Advanced Synthetic Aperture Radar(ASAR)observations of surface soil moisture content were...Active microwave remote sensing data were used to calculate the near-surface soil moisture in the vegetated areas.In this study,Advanced Synthetic Aperture Radar(ASAR)observations of surface soil moisture content were used in a data assimilation framework to improve the estimation of the soil moisture profile at the middle reaches of the Heihe River Basin,Northwest China.A one-dimensional soil moisture assimilation system based on the ensemble Kalman filter(EnKF),the forward radiative transfer model,crop model,and the Distributed Hydrology-Soil-Vegetation Model(DHSVM)was developed.The crop model,as a semi-empirical model,was used to estimate the surface backscattering of vegetated areas.The DHSVM is a distributed hydrology-vegetation model that explicitly represents the effects of topography and vegetation on water fluxes through the landscape.Numerical experiments were conducted to assimilate the ASAR data into the DHSVM and in situ soil moisture at the middle reaches of the Heihe River Basin from June20 to July 15,2008.The results indicated that EnKF is effective for assimilating ASAR observations into the hydrological model.Compared with the simulation and in situ observations,the assimilated results were significantly improved in the surface layer and root layer,and the soil moisture varied slightly in the deep layer.Additionally,EnKF is an efficient approach to handle the strongly nonlinear problem which is practical and effective for soil moisture estimation by assimilation of remote sensing data.Moreover,to improve the assimilation results,further studies on obtaining more reliable forcing data and model parameters and increasing the efficiency and accuracy of the remote sensing observations are needed,also improving estimation accuracy of model operator is important.展开更多
基金Project(N110204015)supported by the Fundamental Research Funds for the Central Universities,ChinaProject(2012M510075)supported by the China Postdoctoral Science Foundation
文摘A combined conduction and radiation heat transfer model was used to simulate the heat transfer within wafer and investigate the effect of thermal transport properties on temperature non-uniformity within wafer surface. It is found that the increased conductivities in both doped and undoped regions help reduce the temperature difference across the wafer surface. However, the doped layer conductivity has little effect on the overall temperature distribution and difference. The temperature level and difference on the top surface drop suddenly when absorption coefficient changes from 104 to 103 m-1. When the absorption coefficient is less or equal to 103 m-1, the temperature level and difference do not change much. The emissivity has the dominant effect on the top surface temperature level and difference. Higher surface emissivity can easily increase the temperature level of the wafer surface. After using the improved property data, the overall temperature level reduces by about 200 K from the basis case. The results will help improve the current understanding of the energy transport in the rapid thermal processing and the wafer temperature monitor and control level.
基金Under the auspices of National Natural Science Foundation for Young Scientists of China(No.41101321)Major State Basic Research Development Program of China(No.2007CB714407)Key Projects in the National Science & Technology Pillar Program(No.2009BAG18B01,2012BAH28B03)
文摘Active microwave remote sensing data were used to calculate the near-surface soil moisture in the vegetated areas.In this study,Advanced Synthetic Aperture Radar(ASAR)observations of surface soil moisture content were used in a data assimilation framework to improve the estimation of the soil moisture profile at the middle reaches of the Heihe River Basin,Northwest China.A one-dimensional soil moisture assimilation system based on the ensemble Kalman filter(EnKF),the forward radiative transfer model,crop model,and the Distributed Hydrology-Soil-Vegetation Model(DHSVM)was developed.The crop model,as a semi-empirical model,was used to estimate the surface backscattering of vegetated areas.The DHSVM is a distributed hydrology-vegetation model that explicitly represents the effects of topography and vegetation on water fluxes through the landscape.Numerical experiments were conducted to assimilate the ASAR data into the DHSVM and in situ soil moisture at the middle reaches of the Heihe River Basin from June20 to July 15,2008.The results indicated that EnKF is effective for assimilating ASAR observations into the hydrological model.Compared with the simulation and in situ observations,the assimilated results were significantly improved in the surface layer and root layer,and the soil moisture varied slightly in the deep layer.Additionally,EnKF is an efficient approach to handle the strongly nonlinear problem which is practical and effective for soil moisture estimation by assimilation of remote sensing data.Moreover,to improve the assimilation results,further studies on obtaining more reliable forcing data and model parameters and increasing the efficiency and accuracy of the remote sensing observations are needed,also improving estimation accuracy of model operator is important.