Aiming at the turning motion＇s disadvantages,including the instability of charge magazine caused by polygon effect and the disability of synchronously pushing modular charge of the current pushing mechanism,a new typ...Aiming at the turning motion＇s disadvantages,including the instability of charge magazine caused by polygon effect and the disability of synchronously pushing modular charge of the current pushing mechanism,a new type of charge feeding mechanism is designed.It can not only select modular charge rapidly and steadily,but also push a certain amount of modular charge into the tray which is used to receive the charge synchronously.The selection and push principles of feeding mechanism are introduced,and a three-dimensional model is established.ADAMS is applied to simulation analysis of the feeding mechanism.The results show that the feeding mechanism can push the modular charge into the reception tray rapidly and steadily,which provides a theoretical basis for the practical design.展开更多
The relation between composition operators on the Dirichlet spaces in the open unit disk and derivative weighted composition operators on the Bergman spaces in the open unit disk is investigated firstly,and for a comb...The relation between composition operators on the Dirichlet spaces in the open unit disk and derivative weighted composition operators on the Bergman spaces in the open unit disk is investigated firstly,and for a combination of several derivative weighted composition operators which acts on classic Bergman space,the lower bound of its essential norm is estimated in terms of the boundary data of the symbols of d-composition operators.Some similar results about composition operators on the Dirichlet space are also presented.A necessary condition is given to determine the compactness of the combination of several derivative weighted composition operators on Bergman spaces.展开更多
This paper deals with the problem of sharp observability inequality for the 1-D plate equation wtt ＋ wxxxx ＋ q（t, x）w = 0 with two types of boundary conditions w = wxx = 0 or w = wx = 0, and q（t, x） being a suit...This paper deals with the problem of sharp observability inequality for the 1-D plate equation wtt ＋ wxxxx ＋ q（t, x）w = 0 with two types of boundary conditions w = wxx = 0 or w = wx = 0, and q（t, x） being a suitable potential. The author shows that 2 the sharp observability constant is of order exp（C｜｜q｜｜^2/7∞） for ｜｜q｜｜∞〉 1. The main tools to derive the desired observability inequalities are the global Carleman inequalities, based on a new point wise inequality for the fourth order plate operator.展开更多
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually use...Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.展开更多
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is...Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.展开更多
In this article,the random walking method is used to solve the steady linear convection-diffusion equation(CDE)with disc boundary condition.The integral solution corresponding to the random walking method is deduced a...In this article,the random walking method is used to solve the steady linear convection-diffusion equation(CDE)with disc boundary condition.The integral solution corresponding to the random walking method is deduced and the relationship between the diffusion coefficient of CDE and the intensity of the random diffusion motion is obtained.The random number generator for arbitrary axisymmetric disc boundary is deduced through the polynomial fitting and inverse transform sampling method.The proposed method is tested through two numerical cases.The results show that the random walking method can solve the steady linear CDE effectively.The influence of the parameters on the results is also studied.It is found that the error of the solution can be decreased by increasing the particle releasing rate and the total walking time.展开更多
The objective of this study is to experimentally examine the characteristics of transient vortices in the boundary layer on a disk undergoing both rotation and orbital motion. The velocity fluctuations on a rotating, ...The objective of this study is to experimentally examine the characteristics of transient vortices in the boundary layer on a disk undergoing both rotation and orbital motion. The velocity fluctuations on a rotating, orbiting disk （disk radius equal to orbital radius） are measured by the hot-wire method, and the effects of orbital motion on the transient vortices in the boundary layer are examined. When the ratio of the orbital speed to the speed of rotation is i-0.025, the interval of transient vortices depends on only the orbital radius, regardless of the directions of rota- tion and orbital motion. The rate of low-frequency disturbances increases as the orbital speed increases, and the vortices induced by these low-frequency disturbances travel over the disk and then develop in the region of in- creased velocity. Consequently, no vortices generated on a rotating disk under orbital motion are stationary rela- tive to the disk.展开更多
文摘Aiming at the turning motion＇s disadvantages,including the instability of charge magazine caused by polygon effect and the disability of synchronously pushing modular charge of the current pushing mechanism,a new type of charge feeding mechanism is designed.It can not only select modular charge rapidly and steadily,but also push a certain amount of modular charge into the tray which is used to receive the charge synchronously.The selection and push principles of feeding mechanism are introduced,and a three-dimensional model is established.ADAMS is applied to simulation analysis of the feeding mechanism.The results show that the feeding mechanism can push the modular charge into the reception tray rapidly and steadily,which provides a theoretical basis for the practical design.
基金Supported by National Natural Science Foundation of China (No. 10971153 and No. 10671141)
文摘The relation between composition operators on the Dirichlet spaces in the open unit disk and derivative weighted composition operators on the Bergman spaces in the open unit disk is investigated firstly,and for a combination of several derivative weighted composition operators which acts on classic Bergman space,the lower bound of its essential norm is estimated in terms of the boundary data of the symbols of d-composition operators.Some similar results about composition operators on the Dirichlet space are also presented.A necessary condition is given to determine the compactness of the combination of several derivative weighted composition operators on Bergman spaces.
基金supported by the National Natural Science Foundation of China (No. 10901114)the Doctoral Fund for New Teachers of the Ministry of Education of China (No. 20090181120084) the National Basic Research Program of China (No. 2011CB808002)
文摘This paper deals with the problem of sharp observability inequality for the 1-D plate equation wtt ＋ wxxxx ＋ q（t, x）w = 0 with two types of boundary conditions w = wxx = 0 or w = wx = 0, and q（t, x） being a suitable potential. The author shows that 2 the sharp observability constant is of order exp（C｜｜q｜｜^2/7∞） for ｜｜q｜｜∞〉 1. The main tools to derive the desired observability inequalities are the global Carleman inequalities, based on a new point wise inequality for the fourth order plate operator.
文摘Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.
基金the 21~(st)Century COE program of Pulse Power Science of Kumamoto University
文摘Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.
基金supported by the International Scientific and Technological Cooperation Program of China(Grant No.2011DFG13020)the China Postdoctoral Science Foundation(Grant No.2013M530043)the National Hi-Tech Research and Development Program of China("863"Project)(Grant No.2007AA05Z426)
文摘In this article,the random walking method is used to solve the steady linear convection-diffusion equation(CDE)with disc boundary condition.The integral solution corresponding to the random walking method is deduced and the relationship between the diffusion coefficient of CDE and the intensity of the random diffusion motion is obtained.The random number generator for arbitrary axisymmetric disc boundary is deduced through the polynomial fitting and inverse transform sampling method.The proposed method is tested through two numerical cases.The results show that the random walking method can solve the steady linear CDE effectively.The influence of the parameters on the results is also studied.It is found that the error of the solution can be decreased by increasing the particle releasing rate and the total walking time.
基金supported by the Harada Memorial Foundation and a Grant-in-Aid for Scientific Research (No. 24560202) from the Japan Society for the Promotion of Science
文摘The objective of this study is to experimentally examine the characteristics of transient vortices in the boundary layer on a disk undergoing both rotation and orbital motion. The velocity fluctuations on a rotating, orbiting disk （disk radius equal to orbital radius） are measured by the hot-wire method, and the effects of orbital motion on the transient vortices in the boundary layer are examined. When the ratio of the orbital speed to the speed of rotation is i-0.025, the interval of transient vortices depends on only the orbital radius, regardless of the directions of rota- tion and orbital motion. The rate of low-frequency disturbances increases as the orbital speed increases, and the vortices induced by these low-frequency disturbances travel over the disk and then develop in the region of in- creased velocity. Consequently, no vortices generated on a rotating disk under orbital motion are stationary rela- tive to the disk.
