In this paper we deduce the analytic solutions of the first- and second-order vertical derivative zero points for gravity anomalies in simple regular models with single, double, and multiple edges and analyze their sp...In this paper we deduce the analytic solutions of the first- and second-order vertical derivative zero points for gravity anomalies in simple regular models with single, double, and multiple edges and analyze their spatial variation. For another simple regular models where it is difficult to obtain the analytic expression of the zero point, we try to use the profile zero points to analyze the spatial variation. The test results show that the spatial variation laws of both first- and second-order vertical derivative zero points are almost the same but the second-order derivative zero point position is closer to the top surface edge of the geological bodies than the first-order vertical derivative and has a relatively high resolution. Moreover, with an increase in buried depth, for a single boundary model, the vertical derivative zero point location tends to move from the top surface edge to the outside of the buried body but finally converges to a fixed value. For a double boundary model, the vertical derivative zero point location tends to migrate from the top surface edge to the outside of the buried body. For multiple boundary models, the vertical derivative zero point location converges from the top surface edge to the outside of the buried body where some zero points coincide and finally vanish. Finally, the effectiveness and reliability of the proposed method is verified using real field data.展开更多
A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of thi...A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of this methodology is to set up a new calibration flow that lets 1D and 2D patterns have the same optical parameters but different effective diffusion lengths. Furthermore, a design for manufacturing （DFM） interaction is suggested in the calibration flow of the pro- posed model. From the CD errors of fitting results and the comparison between simulated contours and SEM images,it is found that the various effective resist diffusion lengths model calibration methodology results in a more accurate and stable model.展开更多
基金jointly supported by the National Major Science and Technology Program (No. 2008ZX05025)the National 973 Program (Grant No. 2009CB219400)
文摘In this paper we deduce the analytic solutions of the first- and second-order vertical derivative zero points for gravity anomalies in simple regular models with single, double, and multiple edges and analyze their spatial variation. For another simple regular models where it is difficult to obtain the analytic expression of the zero point, we try to use the profile zero points to analyze the spatial variation. The test results show that the spatial variation laws of both first- and second-order vertical derivative zero points are almost the same but the second-order derivative zero point position is closer to the top surface edge of the geological bodies than the first-order vertical derivative and has a relatively high resolution. Moreover, with an increase in buried depth, for a single boundary model, the vertical derivative zero point location tends to move from the top surface edge to the outside of the buried body but finally converges to a fixed value. For a double boundary model, the vertical derivative zero point location tends to migrate from the top surface edge to the outside of the buried body. For multiple boundary models, the vertical derivative zero point location converges from the top surface edge to the outside of the buried body where some zero points coincide and finally vanish. Finally, the effectiveness and reliability of the proposed method is verified using real field data.
文摘A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of this methodology is to set up a new calibration flow that lets 1D and 2D patterns have the same optical parameters but different effective diffusion lengths. Furthermore, a design for manufacturing （DFM） interaction is suggested in the calibration flow of the pro- posed model. From the CD errors of fitting results and the comparison between simulated contours and SEM images,it is found that the various effective resist diffusion lengths model calibration methodology results in a more accurate and stable model.
