Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an ...Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.展开更多
In order to optimize the sintering process, a real-time operation guide system with artificial intelligence was developed, mainly including the data acquisition online subsystem, the sinter chemical composition contro...In order to optimize the sintering process, a real-time operation guide system with artificial intelligence was developed, mainly including the data acquisition online subsystem, the sinter chemical composition controller, the sintering process state controller, and the abnormal conditions diagnosis subsystem. Knowledge base of the sintering process controlling was constructed, and inference engine of the system was established. Sinter chemical compositions were controlled by the strategies of self-adaptive prediction, internal optimization and center on basicity. And the state of sintering was stabilized centering on permeability. In order to meet the needs of process change and make the system clear, the system has learning ability and explanation function. The software of the system was developed in Visual C++ programming language. The application of the system shows that the hitting accuracy of sinter compositions and burning through point prediction are more than 85%; the first-grade rate of sinter chemical composition, stability rate of burning through point and stability rate of sintering process are increased by 3%, 9% and 4%, respectively.展开更多
Intracardic air embolism is uncommon, however it is a serious condition which frequently leads to catastrophic complications during or after invasive procedures resulting in significant morbidity and mortality. For a ...Intracardic air embolism is uncommon, however it is a serious condition which frequently leads to catastrophic complications during or after invasive procedures resulting in significant morbidity and mortality. For a successful re- suscitation of patients with intracardiac air embolism, hy- perbaric oxygen therapy is critical.~~2~ Still, due to a hyper- baric chamber＇s unavailability at many hospitals and con- cerns about patient movement resulting in further embolism during transport, such treatment method is gradually dimin- ishing.展开更多
In usual cases of significant pressure gradients and strong shocks, the front shock takes a fixed location along the wall, at which separation starts. Usually the rear shock is responding to vortex sheding by its defl...In usual cases of significant pressure gradients and strong shocks, the front shock takes a fixed location along the wall, at which separation starts. Usually the rear shock is responding to vortex sheding by its deflection angle. In consequence main shock and rear shocks are moving whilst front shock is stable. The goal of the measurements presented here is to find out how the k-foot behaves during shock oscillations in the case when front shock is not fixed by the pressure gradient. Unsteady shock behaviour is also investigated when air jet vortex generators （AJVG） are used. Counteraction of the separation is directly related to the influence on unsteady processes in the shock wave induced separation.展开更多
文摘Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.
文摘In order to optimize the sintering process, a real-time operation guide system with artificial intelligence was developed, mainly including the data acquisition online subsystem, the sinter chemical composition controller, the sintering process state controller, and the abnormal conditions diagnosis subsystem. Knowledge base of the sintering process controlling was constructed, and inference engine of the system was established. Sinter chemical compositions were controlled by the strategies of self-adaptive prediction, internal optimization and center on basicity. And the state of sintering was stabilized centering on permeability. In order to meet the needs of process change and make the system clear, the system has learning ability and explanation function. The software of the system was developed in Visual C++ programming language. The application of the system shows that the hitting accuracy of sinter compositions and burning through point prediction are more than 85%; the first-grade rate of sinter chemical composition, stability rate of burning through point and stability rate of sintering process are increased by 3%, 9% and 4%, respectively.
文摘Intracardic air embolism is uncommon, however it is a serious condition which frequently leads to catastrophic complications during or after invasive procedures resulting in significant morbidity and mortality. For a successful re- suscitation of patients with intracardiac air embolism, hy- perbaric oxygen therapy is critical.~~2~ Still, due to a hyper- baric chamber＇s unavailability at many hospitals and con- cerns about patient movement resulting in further embolism during transport, such treatment method is gradually dimin- ishing.
基金the UFAST project financed by the European Commission within a cooperation sectorunder number:012226
文摘In usual cases of significant pressure gradients and strong shocks, the front shock takes a fixed location along the wall, at which separation starts. Usually the rear shock is responding to vortex sheding by its deflection angle. In consequence main shock and rear shocks are moving whilst front shock is stable. The goal of the measurements presented here is to find out how the k-foot behaves during shock oscillations in the case when front shock is not fixed by the pressure gradient. Unsteady shock behaviour is also investigated when air jet vortex generators （AJVG） are used. Counteraction of the separation is directly related to the influence on unsteady processes in the shock wave induced separation.
