VCA Direct-Drive High Speed and Precision XY Table

In order to compensate for the limitation of conventional XY table used in semiconductor integrated circuits(IC) packaging and improve its speed and accuracy, a voice coil actuator (VCA) direct-drive high-speed and precision positioning XY table used in wire bonder was proposed. Also, a novel flexible decoupling mechanism was used in the positioning table, and the small moving mass enabled the positioning table to move at high speed and precision. XY table deformation interference caused by assembly error and instant interference generated by dynamic load moving with high speed and acceleration can be eliminated through the flexible decoupling mechanism. Considering the positioning table as lumped mass spring system,the dynamic equations of the mechanical system and the VCA were built according to the Newton mechanics principle and electromagnetic theory. Then the electromechanical coupling control model of the system was created through Laplace transform. Based on displacement PID controller, the loop-locked controlling algorithm of the positioning system was investigated. The dynamic control algorithm effectively improved the system dynamic performance. The precision test of the prototype machine was carried out, and the results validated the correctness of the model and the theory. Compared with traditional XY table, the table has higher speed, acceleration and positioning accuracy.