针对三维集成电路中的关键技术硅通孔的电特性,使用传输线理论提取了其单位长度RLGC参数。将硅通孔等效为传输线,利用HFSS仿真结果并结合传输线理论给出了具体的参数提取方法。计算结果表明,硅通孔单位长度RLGC参数呈现较强的频变特性,...针对三维集成电路中的关键技术硅通孔的电特性,使用传输线理论提取了其单位长度RLGC参数。将硅通孔等效为传输线,利用HFSS仿真结果并结合传输线理论给出了具体的参数提取方法。计算结果表明,硅通孔单位长度RLGC参数呈现较强的频变特性,当频率从1 MHz增加到20 GHz时,单位长度的电阻和导纳分别从0.45 mΩ/μm和2.5μS/μm增加到2.5 mΩ/μm和17μS/μm,而单位长度电感和电容分别从8.7 p H/μm和8.8 f F/μm减小至7.5 p H/μm和0.2 f F/μm。与传统的阻抗矩阵和导纳矩阵提取方法相比,该方法具有结果绝对收敛和适用频率高等诸多优点,可进一步应用于三维集成电路的仿真设计。展开更多
KIT‐6 mesoporous silica aged at 40,100,and 150°C were used as hard templates to prepare different mesoporous MnO2 catalysts,marked as Mn‐40,Mn‐100,and Mn‐150,respectively.The catalytic activities of these cat...KIT‐6 mesoporous silica aged at 40,100,and 150°C were used as hard templates to prepare different mesoporous MnO2 catalysts,marked as Mn‐40,Mn‐100,and Mn‐150,respectively.The catalytic activities of these catalysts and the effect of pore sizes on ethanol catalytic oxidation were investigated.Mn‐40,Mn‐100,and Mn‐150 have triple,double,and single pore systems,respectively.On decreasing the aging temperature of KIT‐6,the pore sizes of KIT‐6 decrease and that of mesoporous MnO2 catalysts increase.The pore sizes and catalytic activities increase in the order:Mn‐40>Mn‐100>Mn‐150.Mn‐40 catalyst has a higher TOF(0.11 s–1 at 120°C)and the best catalytic activity for ethanol oxidation because of a bigger pore size with three pore systems with maximum distribution at 1.9,3.4,and 6.6 nm,decrease in symmetry and degree of order,more surface lattice oxygen species,oxygen vacancies resulting from more Mn3+ions,and better low‐temperature reducibility.展开更多
We propose a compact dual-band bandpass filter(BPF)based on one-dimensional porous silicon(PS)photonic crystal by electrochemical etching.By inserting three periods of high and low reflective index layers in the cente...We propose a compact dual-band bandpass filter(BPF)based on one-dimensional porous silicon(PS)photonic crystal by electrochemical etching.By inserting three periods of high and low reflective index layers in the center of porous silicon microcavity(PSM),two sharp resonant peaks appear in the high reflectivity stop band on both sides of the resonance wavelength.Through simulation and experiment,the physical mechanisms of the two resonance peaks and the resonance wavelength are also studied.It is found that the resonance wavelength can be tuned only by adjusting the effective optical thickness(EOT)of each PS layer,in which different resonance wavelengths have different widths between the two sharp resonance peaks.Besides,the analysis indicates that oxidization makes the blue shift become larger for high wavelength than that for low wavelength.Such a fabricated BPF based on PS dual-microcavity is easy to be fabricated and low cost,which benefits the application of integrated optical devices.展开更多
文摘针对三维集成电路中的关键技术硅通孔的电特性,使用传输线理论提取了其单位长度RLGC参数。将硅通孔等效为传输线,利用HFSS仿真结果并结合传输线理论给出了具体的参数提取方法。计算结果表明,硅通孔单位长度RLGC参数呈现较强的频变特性,当频率从1 MHz增加到20 GHz时,单位长度的电阻和导纳分别从0.45 mΩ/μm和2.5μS/μm增加到2.5 mΩ/μm和17μS/μm,而单位长度电感和电容分别从8.7 p H/μm和8.8 f F/μm减小至7.5 p H/μm和0.2 f F/μm。与传统的阻抗矩阵和导纳矩阵提取方法相比,该方法具有结果绝对收敛和适用频率高等诸多优点,可进一步应用于三维集成电路的仿真设计。
基金supported by the National Key Research and Development Program Foundation of China(2016YFC0209203)the National Natural Science Foundation of China(21707130,21325731)~~
文摘KIT‐6 mesoporous silica aged at 40,100,and 150°C were used as hard templates to prepare different mesoporous MnO2 catalysts,marked as Mn‐40,Mn‐100,and Mn‐150,respectively.The catalytic activities of these catalysts and the effect of pore sizes on ethanol catalytic oxidation were investigated.Mn‐40,Mn‐100,and Mn‐150 have triple,double,and single pore systems,respectively.On decreasing the aging temperature of KIT‐6,the pore sizes of KIT‐6 decrease and that of mesoporous MnO2 catalysts increase.The pore sizes and catalytic activities increase in the order:Mn‐40>Mn‐100>Mn‐150.Mn‐40 catalyst has a higher TOF(0.11 s–1 at 120°C)and the best catalytic activity for ethanol oxidation because of a bigger pore size with three pore systems with maximum distribution at 1.9,3.4,and 6.6 nm,decrease in symmetry and degree of order,more surface lattice oxygen species,oxygen vacancies resulting from more Mn3+ions,and better low‐temperature reducibility.
基金supported by the National Training Program of Innovation and Entrepreneurship for Undergraduate(No.201410755013)the Foundation of Xinjiang Education(No.XJEDU2013S04)
文摘We propose a compact dual-band bandpass filter(BPF)based on one-dimensional porous silicon(PS)photonic crystal by electrochemical etching.By inserting three periods of high and low reflective index layers in the center of porous silicon microcavity(PSM),two sharp resonant peaks appear in the high reflectivity stop band on both sides of the resonance wavelength.Through simulation and experiment,the physical mechanisms of the two resonance peaks and the resonance wavelength are also studied.It is found that the resonance wavelength can be tuned only by adjusting the effective optical thickness(EOT)of each PS layer,in which different resonance wavelengths have different widths between the two sharp resonance peaks.Besides,the analysis indicates that oxidization makes the blue shift become larger for high wavelength than that for low wavelength.Such a fabricated BPF based on PS dual-microcavity is easy to be fabricated and low cost,which benefits the application of integrated optical devices.
