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半导体设备工艺配方管理系统研究
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作者 吴燕林 孟晓云 +2 位作者 刘福强 田洪涛 张康 《电子工业专用设备》 2023年第1期40-44,共5页
半导体设备工艺配方(以下简称配方),是指半导体设备工作状态下各种工艺参数的组合,其准确与否直接影响到半导体器件的质量。随着半导体设备自动化需求的不断提高,为减少人为误差,主机端需要严格把控设备端的配方内容,对设备端的配方管... 半导体设备工艺配方(以下简称配方),是指半导体设备工作状态下各种工艺参数的组合,其准确与否直接影响到半导体器件的质量。随着半导体设备自动化需求的不断提高,为减少人为误差,主机端需要严格把控设备端的配方内容,对设备端的配方管理提出了较高的要求。基于主机端与设备端的配方交互需求,对其交互方式进行了阐述,介绍了主机端临时修改配方参数的方法,以便在机台端配置少量配方即可实现多种产品生产,为设备端配方相关的功能开发提供参考依据。 展开更多
关键词 半导体设备 设备自动化 配方管理系统 配方交互
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A MNCIE method for registration of ultrasound images
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作者 金晶 王强 沈毅 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2007年第2期252-258,共7页
A new approach to the problem of registration of ultrasound images is presented, using a concept of Nonlinear Correlation Information Entropy (NCIE) as the matching criterion. The proposed method applies NCIE to measu... A new approach to the problem of registration of ultrasound images is presented, using a concept of Nonlinear Correlation Information Entropy (NCIE) as the matching criterion. The proposed method applies NCIE to measure the correlation degree between the image intensities of corresponding voxel in the floating and reference images. Registration is achieved by adjustment of the relative position until NCIE between the images is maximized. However, unlike mutual information (MI), NCIE varies in the closed interval [0, 1], and around the extremum it varies sharply, which makes it possible that thresholds of NCIE can be used to boost the search for the registration transformation. Using this feature of NCIE, we combine the downhill simplex searching algorithm to register the ultrasound images. The simulations are conducted to testify the effectiveness and rapidity of the proposed registration method, in which the ultrasound floating images are aligned to the reference images with required registration accuracy. Moreover, the NCIE based method can overcome local minima problem by setting thresholds and can take care of the differences in contrast between the floating and reference images. 展开更多
关键词 image registration nonlinear correlation information entropy mutual information downhill simplex
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Dynamic interaction analysis and pairing evaluation in control configuration design
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作者 Xionglin Luo Pengfei Cao Feng Xu 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2016年第7期861-868,共8页
This paper presents some new dynamic interaction analysis approaches for square or non-square systems and a pairing evaluation method. For square stable systems, an open-loop approach is proposed, which features the t... This paper presents some new dynamic interaction analysis approaches for square or non-square systems and a pairing evaluation method. For square stable systems, an open-loop approach is proposed, which features the tradeoff between the contributions of response time constant and delay time to relative gain. For non-square stable systems, an extension from the proposed open-loop approach for square systems is presented and the corresponding pairing procedure is given. No interaction analysis approach is perfect for all systems, so any recommended pairing needs to be examined. An evaluation method is proposed in closed-loop with optimal controllers for each loop and whether the pairing is appropriate can be evaluated through testing if the equivalent relative gain is within defined scope. The advantages and effectiveness of proposed interaction analysis approaches and pairing evaluation method are highlighted via several examples of industrial processes. 展开更多
关键词 Control configurationInteractionPairing evaluationNon-square systemsPID
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Synthesis and Crystal Structure of a New Chain Coordination Polymer [Cu(inio)_2(H_2O)]_∞(Inio = Isonicotinic Acid N-Oxide)
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作者 李秀玲 陈久桐 +2 位作者 牛德仲 盛居廷 张大鹏 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 北大核心 2003年第4期415-418,共4页
A new Cu(Ⅱ) coordination polymer [Cu(inio)2(H2O)] (inio = isonicotinic acid N-oxide) with chemical formula C12H10CuN2O7 was prepared and its crystal structure has been determined by X-ray analysis. The complex crysta... A new Cu(Ⅱ) coordination polymer [Cu(inio)2(H2O)] (inio = isonicotinic acid N-oxide) with chemical formula C12H10CuN2O7 was prepared and its crystal structure has been determined by X-ray analysis. The complex crystallizes in the monoclinic system, space group C2/c with a = 12.455(3), b = 6.202(1), c = 16.555(3) ? b = 106.776(3), V = 1224.3(4) 3, Z = 4, Mr = 357.76, Dc =1.941 g/cm3, m(MoKa) = 1.827 mm-1, F(000) = 724, R = 0.0601 and wR = 0.1417 for 908 observed reflections (I > 2s(I)). The Cu(Ⅱ) atom is coordinated by an elongated square pyramid geometry. The deprotonated isonicotinic acid N-oxides form a double-bridge between each pair of Cu(Ⅱ) ions in trans form through two oxygen atoms from the carboxyl groups and two other oxygen atoms from the -NO groups, respectively, which leads to an infinite one dimensional chain. The two adjacent elongated Cu(Ⅱ) square pyramidal geometries are arranged in trans form in the same chain. The OH…O hydrogen bonds extend the chain structure into two-dimensional layers. 展开更多
关键词 crystal structure copper isonicotinic acid N-oxide elongated square pyramid hydrogen bond π-πinteraction
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