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PDP扫描驱动芯片的新型200VP沟功率MOSFET及工艺研究 被引量:1
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作者 易扬波 孙伟锋 +2 位作者 孙智林 陈畅 陆生礼 《应用科学学报》 CAS CSCD 2004年第2期162-166,共5页
提出了一种适合PDP扫描驱动芯片的高压P沟道ED-LDMOS器件结构,源漏击穿电压及栅耐压均达到220V以上.通过添加P型扩展阱,能够有效降低P+漏极边缘电场60%,减轻漏极电流汇聚效应,抑制寄生双极型晶体管开启,从而原器件开启态耐压(180V)提高... 提出了一种适合PDP扫描驱动芯片的高压P沟道ED-LDMOS器件结构,源漏击穿电压及栅耐压均达到220V以上.通过添加P型扩展阱,能够有效降低P+漏极边缘电场60%,减轻漏极电流汇聚效应,抑制寄生双极型晶体管开启,从而原器件开启态耐压(180V)提高了40V;同时设计了能与0.6μm标准低压CMOS工艺完全兼容的制备工艺,特别提出一种厚栅氧与多晶栅的刻蚀方法——余量刻蚀法,有效防止由于光刻误差引起的栅源短路击穿. 展开更多
关键词 功率集成电路 功率器件 半导体工艺 PDP扫描驱动芯片 MOSFET 量刻蚀 等离子平板显示器
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Quasi-3-D Au mushrooms with programmable morphology for high-capacity flexible plasmonic encoding 被引量:1
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作者 Dong Li Yinghui Sun +7 位作者 Yawen Wang Bo Zhao Wenkai Liang Yuanlan Liu Heng Gao Yaqi Ye Jiating Li Lin Jiang 《Science China Materials》 SCIE EI CAS CSCD 2022年第8期2227-2234,共8页
Plasmonic encoding composed of metallic nanostructures makes a great contribution to the practical application of information encryption.However,most reports have so far shown the preparation of single or binary plasm... Plasmonic encoding composed of metallic nanostructures makes a great contribution to the practical application of information encryption.However,most reports have so far shown the preparation of single or binary plasmonic encoding patterns because of the technical difficulty of assembling multiplex nanostructures on a single platform,which cannot satisfy the requirements of high encoding capacity for increasing information security.Herein,we developed a strategy based on plasma etching combined with in-situ growth to fabricate patterned arrays of quasi-three-dimensional(3-D)plasmonic Au nano-mushrooms with controlled morphologies,and successfully realized ideal high-capacity plasmonic encoding by arranging Au nano-mushrooms on one platform.On this basis,such multiplex encoding patterns have been transferred to the flexible substrate to realize the triple-mode encryption of the Morse code of"FUNSOM",indicating great prospects in the applications of information encryption and data storage. 展开更多
关键词 PLASMONIC ENCODING high capacity FLEXIBLE information protection
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