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金刚石表面刻蚀研究进展 被引量:1
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作者 王俊沙 刘莹莹 李园园 《中原工学院学报》 CAS 2022年第3期1-10,共10页
金刚石具有优异的机械、电、热及化学性能,广泛应用于高效加工、生物传感器、半导体及量子器件等领域,而刻蚀技术对其性能发挥起着重要作用。根据刻蚀剂种类,金刚石刻蚀分为熔盐刻蚀、气相刻蚀、金属刻蚀及金属氧化物刻蚀。熔盐刻蚀借... 金刚石具有优异的机械、电、热及化学性能,广泛应用于高效加工、生物传感器、半导体及量子器件等领域,而刻蚀技术对其性能发挥起着重要作用。根据刻蚀剂种类,金刚石刻蚀分为熔盐刻蚀、气相刻蚀、金属刻蚀及金属氧化物刻蚀。熔盐刻蚀借助熔融硝酸盐中产生的高活性氧对金刚石进行选择性腐蚀。气相刻蚀利用气体或等离子体与金刚石反应从而在金刚石表面制备特殊形状的阵列。金属刻蚀分为金属反应刻蚀、金属催化刻蚀和金属催化氢气刻蚀,可用于金刚石磨粒表面微图案化和薄膜表面微纳米孔制备。金属氧化物刻蚀通过氧化物与金刚石之间的氧化还原反应对金刚石进行腐蚀。介绍了以上四大类金刚石刻蚀技术的研究进展、作用原理和应用情况。 展开更多
关键词 金刚石 熔盐刻蚀 气相刻蚀 金属刻蚀 金属氧化物刻蚀
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Defect engineered 2D mesoporous Mo-Co-O nanosheets with crystalline-amorphous composite structure for efficient oxygen evolution 被引量:3
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作者 Chuansheng He Xiaochen Hu +6 位作者 Jia Wang Lingzheng Bu Changhong Zhan Bingyan Xu Leigang Li Yunchao Li Xiaoqing Huang 《Science China Materials》 SCIE EI CAS CSCD 2022年第12期3470-3478,共9页
Two-dimensional(2D)mesoporous metal-oxide(hydroxide)nanomaterials with defects are promising towards the realization of efficient electrocatalysis.Herein,we report a facile and effective one-pot solvothermal route to ... Two-dimensional(2D)mesoporous metal-oxide(hydroxide)nanomaterials with defects are promising towards the realization of efficient electrocatalysis.Herein,we report a facile and effective one-pot solvothermal route to synthesize mesoporous Mo_(x)-Co-O hybrid nanosheets(NSs)which is composed of crystalline Mo_(4)O_(11) and amorphous cobalt hydroxide.Due to the corrosion of 1-octylamine at high temperatures,abundant mesoporous holes are created in situ over the Mo_(x)-Co-O hybrid NSs during the solvothermal process,which is beneficial to increasing the electrochemical surface area.The dimension of the Mox-Co-O NSs,size of mesoporous and the concentration of defects can be easily modulated by controlling the molar ratio of Mo/Co.Electrochemical measurements reveal that the 2D mesoporous Mo_(x)-Co-O NSs show an excellent activity for the oxygen evolution reaction with the highest catalytic activity of η_(10)=276 mV at 10 mA cm^(−2)in 1 mol L^(−1)KOH.Enhanced adsorption of intermediates and abundant oxygen vacancies achieved by appropriate Mo doping are the two main factors that contribute to the excellent catalytic activity of Mo_(0.2)-Co-O NSs.This work,with the construction of 2D metal-oxide(hydroxide)crystallineamorphous nanomaterials possessing abundant holes,oxygen vacancies and enhanced adsorption of intermediates,provides important insight on the design of more efficient catalysts. 展开更多
关键词 MESOPOROUS oxygen vacancy AMORPHOUS NANOSHEET oxygen evolution reaction
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