一种采用圆片级真空封装的全硅MEMS三明治电容式加速度计

全硅MEMS加速度计具有温度特性好、封装体积小、成本低的优点,从而成为小型化GNC(制导、导航与控制)系统的关键器件。给出了一种具有三层硅结构的MEMS三明治加速度计的设计、加工以及圆片级真空封装方法,其中,中间硅摆片的3D结构通过双面KOH湿法腐蚀制造,腐蚀过程中使用台阶化的SiO_2作为硬掩模。硅盖板的加工主要通过KOH各向异性腐蚀和电感耦合等离子体垂直刻蚀完成。最后,上、下硅盖板通过基于Au-Si共晶反应的全硅键合技术从两侧与硅中间摆片进行键合,并实现圆片级真空封装。三明治加速度计的腔体内封装了压力为200 Pa的高纯氮气。测试结果表明,所述加速度计的闭环输出灵敏度为0.575 V/g,零位误差为0.43 g。加速度计的-3dB带宽为278.14Hz。加速度计1 h的输出稳定性为2.23×10-4 g(1σ)。加速度计在全温范围(-40℃~60℃)内的输出漂移为45.78 mg,最大温度滞环为3.725 mg。

Effects of cooling rate on solution heat treatment of as-cast A356 alloy

The effect of cooling rate of the solidification process on the following solution heat treatment of A356 alloy was investigated,where the cooling rates of 96 K/s and 3 K/s were obtained by the step-like metal mold.Then the eutectic silicon morphology evolution and tensile properties of the alloy samples were observed and analyzed after solution heat treatment at 540 °C for different time.The results show that the high cooling rate of the solidification process can not only reduce the solid solution heat treatment time to rapidly modify the eutectic silicon morphology,but also improve the alloy tensile properties.Specially,it is found that the disintegration,the spheroidization and coarsening of eutectic silicon of A356 alloy are completed during solution heat treatment through two stages,i.e.,at first,the disintegration and spheroidization of the eutectic silicon mainly takes place,then the eutectic silicon will coarsen.

Effect of ultrasonic vibration on Fe-containing intermetallic compounds of hypereutectic Al-Si alloys with high Fe content

The Fe-containing intermetallic compounds with high melting point in hypereutectic Al-Si alloys can improve the heat resistance and wear resistance at elevated temperatures. However, the long needle-like Fe-containing compounds in the alloys produced by conventional casting process are detrimental to the strength of matrix. The effect of ultrasonic vibration （USV） on the morphology change of Fe-containing intermetallic compounds in the hypereutectic Al-17Si-xFe （x=2, 3, 4, 5） alloys was systematically studied. The results show that, the Fe-containing intermetallic compounds are mainly composed of long needle-like β-Al5FeSi phase with a small amount of plate-like δ-Al4FeSi2 phase in Al-17Si-2Fe alloy produced by conventional casting process. With the increase of Fe content from 2% to 5% in the alloys, the amount of plate-like or coarse needle-like δ-Al4FeSi2 phase increases while the amount of long needle-like β-Al5FeSi phases decreases. In Al-17Si-5Fe alloy, the Fe-containing intermetallic compounds exist mainly as coarse needle-like δ-Al4FeSi2 phase. After USV treatment, the Fe-containing compounds in the Al-17Si-xFe alloys are refined and exist mainly as δ-Al4FeSi2 particles, with average grain size ranging from 26 μm to 37 μm, and only a small amount of β-Al5FeSi phases remain. The mechanism of USV on the morphology of Fe-containing intermetallic compounds was also discussed.

Effects of La-Ce addition on microstructure and mechanical properties of Al-18Si-4Cu-0.5Mg alloy

The microstructural evolution and mechanical properties of Al-18 Si-4 Cu-0.5 Mg alloy modified by the addition of La-Ce rare earth elements through OM,SEM,EPMA and tensile tests were investigated.The results of OM and SEM analyses indicated that primary Si particles were significantly refined from coarse block-like and irregular polygonal shapes into fine flaky shapes,while eutectic Si particles were modified from coarse and needle-like into fine and rod-or coral-like shapes with increase of La-Ce addition.The alloy exhibited the minimum primary Si particle size and the best mechanical properties with the addition of 0.3 wt.%La-Ce.The average particle size decreased from 61 to 28 μm,the ultimate tensile strength increased from 222 to 242 MPa and the elongation increased from 3.2% to 6.3%.In addition,modification mechanisms and fracture modes were explored by the means of SEM and EPMA.

Effect of cooling rates on as-cast microstructures of Mg-9Al-xSi(x=1,3) alloys

The effects of cooling rates corresponding to different diameters of the steel mould and laser surface melting(LSM)on the as-cast microstructures of Mg-9Al-xSi(x=1,3)(mass fraction,%)alloys were investigated by XRD and OM.The results show that obvious refinement of the alloy microstructure is obtained with increasing cooling rate by conventional ingot metallurgy.However, no evident modified morphologies of both dendritic primary Mg2Si and Chinese script eutectic Mg2Si in the Mg-Al-Si alloy occurs. Surprisingly,the morphologies of Mg2Si phases within the laser-melted Mg-Al-Si alloy transform drastically from both coarse Chinese script shape for the eutectic Mg2Si and dendrite for the primary Mg2Si to fine spherical particles with an average size of about 3μm due to the rapid cooling of the melted layer,and the Mg2Si particulates distribute more uniformly in theα-Mg matrix.

Improvement in dry sliding wear resistance of Al-17Si-5Cu alloy after an enhanced heat treatment process

To improve the wear resistance of cast Al?17Si?5Cu alloy(AR alloy),isothermal heat treatment is employed to modify the morphology of Si particles(particularly eutectic Si particles).Furthermore,wear behaviour of heat-treated alloy(HT alloy)along with AR alloy is studied using a pin-on-disc tribometer.Worn surfaces are then characterised using scanning electron microscope.The result reveals considerable microstructural modifications after the heat treatment.Accordingly,higher hardness value in HT alloy is obtained compared with AR alloy.The overall wear rate for HT alloy is found to be significantly lower compared with AR alloy at all the applied loads,indicating remarkable improvement in wear resistance.Eutectic Si particles become from acicular/rod-like to spherical/equiaxed morphology(aspect ratio close to 1)on heat treatment,resulting in good bonding with the matrix.Thus,they remain intact during wear and being harder,providing resistance to wear.Moreover,the increased hardness on heat treatment causes further resistance to wear.Therefore,the combined effect of intact harder Si particles on the wearing surface and higher hardness results in superior wear behavior in HT alloy at all loads compared with AR alloy.

Effect of complex modification of Al-5Ti and Al-3P on hypereutectic Al-18Si alloys

The solidification microstructure,fracture morphologies,and mechanical properties of an Al-18Si alloy and alloys modified with Al-5Ti and Al-3P master alloys were investigated using an optical microscope,scanning electron microscope,and an electronic universal testing machine.The results show that additions of Al-5Ti and Al-3P have significant effects on the size and area fraction of the primary Si and the mechanical properties of the Al-18Si alloy.Compared to the Al-18Si alloy modified with 0.6 wt%Al-5Ti at 850°C,when the Al-18Si alloy was modified with 0.3 wt%Al-5Ti and 0.5 wt%Al-3P at the same temperature,the average size of the primary Si decreased from 39 to 14μm and the area fraction increased from 9.5%to 11.6%.The biggest influencing factor on the tensile strength and elongation of the Al-18Si alloy is the addition of Al-3P,followed by the modification temperature and the addition of Al-5Ti.At a modification temperature of 850°C,the tensile strength and elongation of the Al-18Si alloy modified with 0.3 wt%Al-5Ti+0.5 wt%Al-3P increased by 19.6%and 88.6%,respectively compared to that of the Al-18Si alloy modified with 0.6 wt%Al-5Ti.

Influence of rheo-diecasting processing parameters on microstructure and mechanical properties of hypereutectic Al-30%Si alloy

The effects of pouring temperature,vibration frequency,and the number of curves in a serpentine channel,on themicrostructure and mechanical properties of Al-30%Si alloy processed by rheo-diecasting(RDC)were investigated.The semisolidAl-30%Si alloy slurry was prepared by vibration serpentine channel pouring(VSCP)process in the RDC process.The results showthat the pouring temperature,the vibration frequency,and the number of the curves strongly affect the microstructure and mechanicalproperties of Al-30%Si alloy.Under experimental conditions of a pouring temperature of850°C,a twelve-curve copper channel anda vibration frequency of80Hz,the primary Si grains are refined into fine compact grains with average grain size of about24.6μm inthe RDC samples assisted with VSCP.Moreover,the ultimate tensile strength(UTS),elongation and hardness of the RDC sample are296MPa,0.87%and HB155,respectively.It is concluded that the VSCP process can effectively refine the primary Si grains.Therefinement of primary Si grains is the major cause for the improvement of the mechanical properties of the RDC sample.

感应加热硅衬底上的金膜用于圆片键合(英文)

选用垂直于其表面的射频磁场对镀金膜的硅片进行了感应加热,由于磁场对材料加热具有选择性,感应热量首先作用于硅片上的金膜内,硅片先被传导加热到一定温度,然后被感应加热。理论上分析了该方法的可行性,初步试验结果表明,虽然金膜厚度低于感应趋肤深度,但在没有应用感应加热基座的情况下,几秒钟内就形成了金硅共晶相。另外,升温速度快,有效减少了加热过程中金对硅的扩散影响,该方法可广泛用于微系统封装中的圆片键合。

Effects of La on microstructure and mechanical properties of NbMoTiVSi0.2 refractory high entropy alloys

To study the effects of La on the microstructure and mechanical properties of refractory high entropy alloys,NbMoTiVSi0.2 alloys with different La contents were prepared.Phase constitution,microstructure evolution,compressive properties and related mechanisms were systematically studied.Results show that the alloys with La addition are composed of BCC solid solution,eutectic structure,MSi2 disilicide phase and La-containing precipitates.Eutectic structure and most of La precipitates are formed at the grain boundaries.Disilicide phase is formed in the grains.La can change the grain morphologies from dendritic structure to near-equiaxed structure,and the average grain size decreases from 180 to 20μm with the increase of La content from 0 to 0.5 at.%.Compressive testing shows that the ultimate strength and the yield strength increase with the increase of La content,which is resulted from the grain boundary strengthening.However,they cannot be greatly improved because of the formation of MSi2 disilicide phase with low strength.The ductility decreases with the increase of La content,which is due to the La precipitates and brittle MSi2 disilicide phase.

Microstructure and mechanical property of A356 based composite by friction stir processing

Friction stir processing （FSP） was used to incorporate SiC particles into the matrix of A356 Al alloy to form composite material. Constant tool rotation speed of 1800 r/min and travel speed of 127 mm/min were used in this study. The base metal （BM） shows the hypoeutectic Al-Si dendrite structure. The microstructure of the stir zone （SZ） is very different from that of the BM. The eutectic Si and SiC particles are dispersed homogeneously in primary Al solid solution. The thermo-mechanically affected zone （TMAZ）, where the original microstructure is greatly deformed, is characterized by dispersed eutectic Si and SiC particles aligned along the rotational direction of the tool. The hardness of the SZ shows higher value than that of the BM because some defects are remarkably reduced and the eutectic Si and SiC particles are dispersed over the SZ.