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MEMS悬臂梁探针的结构与材料研究 被引量:2
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作者 程融 周玉修 《传感器与微系统》 CSCD 北大核心 2021年第11期44-46,共3页
针对当前晶圆测试探针常用的两种金属材料镍和钨,采用COMSOL多物理场仿真软件对微机电系统(MEMS)悬臂梁探针在承受20 mN测试力时,悬臂梁结构的最大应力和针尖位移进行分析。仿真结果表明:两种材料悬臂梁结构的最大应力都发生在靠近悬臂... 针对当前晶圆测试探针常用的两种金属材料镍和钨,采用COMSOL多物理场仿真软件对微机电系统(MEMS)悬臂梁探针在承受20 mN测试力时,悬臂梁结构的最大应力和针尖位移进行分析。仿真结果表明:两种材料悬臂梁结构的最大应力都发生在靠近悬臂梁固支端的表面,大小基本相同。但镍探针位移要明显大于钨探针。在此结果的基础上,对梁结构进行改进,又提出了一种新型的梯形悬臂梁结构,在承受相同测试力时,针尖位移增加20%。利用这一结构,在保证力学性能的同时,可以缩小悬臂梁尺寸,以满足更为密集管脚芯片的测试需求。 展开更多
关键词 晶圆测试 悬臂梁探针 最大应力 针尖位移 梯形悬臂梁
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An effective algorithm for needle tip displacement compensation in robot-assisted percutaneous surgery 被引量:1
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作者 Sun Yinshan Wu Dongmei Du Zhijiang Sun Lining 《High Technology Letters》 EI CAS 2010年第3期306-310,共5页
This paper presents an automatic compensation algorithm for needle tip displacement in order to keep the needle tip always fixed at the skin entry point in the process of needle orientation in robot-assisted percutane... This paper presents an automatic compensation algorithm for needle tip displacement in order to keep the needle tip always fixed at the skin entry point in the process of needle orientation in robot-assisted percutaneous surgery. The algorithm, based on a two-degree-of-freedom (2-DOF) robot wrist (not the mechanically constrained remote center of motion (RCM) mechanism) and a 3-DOF robot ann, firstly calculates the needle tip displacement caused by rotational motion of robot wrist in the arm coordinate frame using the robotic forward kinematics, and then inversely compensates for the needle tip displace- ment by real-time Cartesian motion of robot arm. The algorithm achieves the function of the RCM and eliminates many mechanical and virtual constraints caused by the RCM mechanism. Experimental result demonstrates that the needle tip displacement is within 1 inm in the process of needle orientation. 展开更多
关键词 robot-assisted percutaneous surgery needle insertion robot needle tip displacement compensation remote center of motion (RCM) virtual remote center of motion (VRCM) medical robot
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