与微米金刚石薄膜不同,纳米金刚石薄膜表面平滑。因此,在摩擦学应用领域中,纳米金刚石薄膜是最理想的。本研究利用CH4/H2微波等离子体CVD工艺在纯钛上沉积出纳米金刚石薄膜和微米金刚石薄膜。采用的沉积条件为:沉积温度约为1173K;沉积...与微米金刚石薄膜不同,纳米金刚石薄膜表面平滑。因此,在摩擦学应用领域中,纳米金刚石薄膜是最理想的。本研究利用CH4/H2微波等离子体CVD工艺在纯钛上沉积出纳米金刚石薄膜和微米金刚石薄膜。采用的沉积条件为:沉积温度约为1173K;沉积压力为8.0kPa;CH4浓度在0.5 m o l%和5 m o l%之间变化;沉积时间则从4h到12h不等。金刚石薄膜表面用扫描电镜(SEM)观察。在激光拉曼光谱中,微米金刚石薄膜在1332cm-1处有sp3键碳的锐峰。1140cm-1附近的光谱带与纳米金刚石薄膜的特征有关。并用X射线衍射对金刚石薄膜进行了分析。X射线衍射花样证实,纳米金刚石薄膜存在(111)面和(220)面。金刚石薄膜的表面粗糙度随着CH4浓度的增加而减小。但是,甲烷浓度在2 m o l%与5 m o l%之间变化时,金刚石薄膜的表面粗糙度接近50nm。据证实,CH4浓度在2 m o l%和5 m o l%之间,利用CH4/H2微波等离子体CVD工艺可以沉积出纳米金刚石薄膜。展开更多
Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surfac...Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surface morphology of the thin film were studied by X-ray diffractometry(XRD) and scan electronic microscopy(SEM). The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy(XPS). On the sample surface,O 1s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions,while C1s only result from surface contamination. The result shows that only one chemical state is found for each spectrum of Ba 3d,Zr 3d and Ti 2p photoelectron in the BZT thin film.展开更多
文摘与微米金刚石薄膜不同,纳米金刚石薄膜表面平滑。因此,在摩擦学应用领域中,纳米金刚石薄膜是最理想的。本研究利用CH4/H2微波等离子体CVD工艺在纯钛上沉积出纳米金刚石薄膜和微米金刚石薄膜。采用的沉积条件为:沉积温度约为1173K;沉积压力为8.0kPa;CH4浓度在0.5 m o l%和5 m o l%之间变化;沉积时间则从4h到12h不等。金刚石薄膜表面用扫描电镜(SEM)观察。在激光拉曼光谱中,微米金刚石薄膜在1332cm-1处有sp3键碳的锐峰。1140cm-1附近的光谱带与纳米金刚石薄膜的特征有关。并用X射线衍射对金刚石薄膜进行了分析。X射线衍射花样证实,纳米金刚石薄膜存在(111)面和(220)面。金刚石薄膜的表面粗糙度随着CH4浓度的增加而减小。但是,甲烷浓度在2 m o l%与5 m o l%之间变化时,金刚石薄膜的表面粗糙度接近50nm。据证实,CH4浓度在2 m o l%和5 m o l%之间,利用CH4/H2微波等离子体CVD工艺可以沉积出纳米金刚石薄膜。
基金Project(05001825) supported by Guangdong Provincial Natural Science Foundation of Chinaproject(KF0707) supported by the Opening Project Program of Key Laboratory of Low Dimensional Materials and Application Technology (Xiangtan University), Ministry ofEducation, China
文摘Ferroelectric materials were widely applied for actuators and sensors. Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition. Structure and surface morphology of the thin film were studied by X-ray diffractometry(XRD) and scan electronic microscopy(SEM). The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy(XPS). On the sample surface,O 1s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions,while C1s only result from surface contamination. The result shows that only one chemical state is found for each spectrum of Ba 3d,Zr 3d and Ti 2p photoelectron in the BZT thin film.
