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铜-钼源漏电极对非晶氧化铟镓锌薄膜晶体管性能的改善 被引量:3
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作者 宁洪龙 胡诗犇 +9 位作者 朱峰 姚日晖 徐苗 邹建华 陶洪 徐瑞霞 徐华 王磊 兰林锋 彭俊彪 《物理学报》 SCIE EI CAS CSCD 北大核心 2015年第12期65-71,共7页
在铜(Cu)和非晶铟镓锌氧化物(a-IGZO)之间插入30 nm厚的钼(Mo)接触层,制备了具有Cu-Mo源漏电极的a-IGZO薄膜晶体管(TFT).Mo接触层不仅能够抑制Cu与a-IGZO有源层之间的扩散,而且提高了Cu电极与玻璃基底以及栅极绝缘层的结合强度.制备的Cu... 在铜(Cu)和非晶铟镓锌氧化物(a-IGZO)之间插入30 nm厚的钼(Mo)接触层,制备了具有Cu-Mo源漏电极的a-IGZO薄膜晶体管(TFT).Mo接触层不仅能够抑制Cu与a-IGZO有源层之间的扩散,而且提高了Cu电极与玻璃基底以及栅极绝缘层的结合强度.制备的Cu-Mo结构TFT与纯Cu结构TFT相比,具有较高的迁移率(~9.26 cm2·V-1·s-1)、更短的电流传输长度(~0.2μm)、更低的接触电阻(~1072Ω)和有效接触电阻率(~1×10-4Ω·cm2),能够满足TFT阵列高导互联的要求. 展开更多
关键词 高导互联 非晶氧化铟镓锌 薄膜晶体管 铜-钼源漏电极
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泡沫镍复合材料的制备与表征 被引量:2
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作者 陈国力 宋坤 +3 位作者 赵楠 王文波 殷广明 黄孝明 《高师理科学刊》 2020年第4期66-68,共3页
分别采用钼酸钠、钼酸铵、磷钼酸、磷钼酸铵合成泡沫镍复合材料,使用XRD和SEM分析合成的泡沫镍复合材料的晶型和形貌.结果表明,泡沫镍复合材料反应最佳条件为:反应温度为200℃,反应时间为10 h.
关键词 泡沫镍 钼源 XRD SEM
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A Modified Cold Molybdenum Cathode Penning Ion Source 被引量:1
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作者 Adel Gomah Helal Hesham El-Khabeary Tawfik Samah Ibrihem Radwan 《Journal of Physical Science and Application》 2013年第4期229-237,共9页
In this paper, design and construction of a modified cold molybdenum cathode Penning ion source was described. It consists of copper cylindrical anode with two cone ends and two movable cold molybdenum cathodes. The t... In this paper, design and construction of a modified cold molybdenum cathode Penning ion source was described. It consists of copper cylindrical anode with two cone ends and two movable cold molybdenum cathodes. The two cathodes were placed symmetrically at two ends of the anode. The modifications were decrease the length of the cylindrical anode to 4 cm instead of 6 cm, transform the copper emission electrode shape from plate of 40 mm length, 25 mm width and 2 mm thickness to disc of 20 mm diameter and 2 mm thickness and transform the inner uncovered area of the emission electrode from slit of 30 mm length and 10 mm width to disc of 5 mm diameter. The copper emission electrode was placed in the middle of the cylindrical anode and has aperture in the center of different diameters. Faraday cup was placed at different distances from the emission electrode aperture. The electrical discharge and the output ion beam characteristics of the modified ion source were measured at different pressures using argon gas. It was found that the optimum operating conditions of the modified ion source are; anode-cathode distance equal to 6 mm, emission electrode aperture diameter equal to 2.5 mm and emission electrode aperture, Faraday cup distance equals 3 cm. The effect of axial samarium cobalt permanent magnet of intensity equal to 300 Gauss on the discharge characteristics of the ion source was determined. 展开更多
关键词 Penning ion source cold molybdenum cathode samarium cobalt permanent magnet.
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