SrBi2.2 Ta2O9(SBT) thin film with thickness of 2μm was successfully prepared by sol-gel method, using strontium acetate semihydrate [Sr(CH3COO)2·1/2H2O] and bismth subnitrate [BiO(NO3)], and tantalum ethox...SrBi2.2 Ta2O9(SBT) thin film with thickness of 2μm was successfully prepared by sol-gel method, using strontium acetate semihydrate [Sr(CH3COO)2·1/2H2O] and bismth subnitrate [BiO(NO3)], and tantalum ethoxide [Ta(OCH2CH3)5] as source materials, glacial acetic and ethylene glycol as solvents. The X-ray diffraction(XRD) and transmission electron microscope(TEM) results indicate that SBT layer-perovskite phase obtained has to be single phase, SBT thin film is formed after being annealed at 800℃ for 1min. The typical hysteresis loop of SBT thin film on Pt/Ti/SiO2/Si is obtained, and the measured polarization value of the SBT thin film is 4.2μC/cm2.展开更多
文摘SrBi2.2 Ta2O9(SBT) thin film with thickness of 2μm was successfully prepared by sol-gel method, using strontium acetate semihydrate [Sr(CH3COO)2·1/2H2O] and bismth subnitrate [BiO(NO3)], and tantalum ethoxide [Ta(OCH2CH3)5] as source materials, glacial acetic and ethylene glycol as solvents. The X-ray diffraction(XRD) and transmission electron microscope(TEM) results indicate that SBT layer-perovskite phase obtained has to be single phase, SBT thin film is formed after being annealed at 800℃ for 1min. The typical hysteresis loop of SBT thin film on Pt/Ti/SiO2/Si is obtained, and the measured polarization value of the SBT thin film is 4.2μC/cm2.