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卫星展开机构用热刀切割器大气失效机理分析
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作者 陈炜 李庆林 +3 位作者 王鹏 强志青 崔琦峰 乔丽 《装备环境工程》 CAS 2024年第8期83-95,共13页
目的分析图案化电阻Pt薄膜在大气环境下使用寿命下降的原因。方法基于此,选取现有型号热刀切割器图案化电阻薄膜,制备不同厚度Pt/Ti膜,重点考察大气环境下薄膜表界面形貌、成分、晶体结构随温度的变化规律及其对电阻率特性以及力学性能... 目的分析图案化电阻Pt薄膜在大气环境下使用寿命下降的原因。方法基于此,选取现有型号热刀切割器图案化电阻薄膜,制备不同厚度Pt/Ti膜,重点考察大气环境下薄膜表界面形貌、成分、晶体结构随温度的变化规律及其对电阻率特性以及力学性能影响。结果大气高温下,Ti过渡层从底层扩散至表面与Pt形成合金,部分Ti扩散至表面被氧化,合金化与氧化导致薄膜电阻率先升高后降低。同时,充当Pt薄膜与基底之间“黏合剂”的Ti过渡层扩散耗尽,导致Pt薄膜与氮化硅基底结合力降低。结论以上因素最终导致了图案化薄膜热刀大气高温环境下切割寿命下降。 展开更多
关键词 图案化薄膜 热刀切割器 磁控溅射 失效机理 铂基薄膜 热稳定性
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Microstructures and magnetic properties of [SiO_2/FePt]_5/Ag thin films 被引量:2
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作者 范九萍 许小红 +2 位作者 江凤仙 田宝强 武海顺 《Journal of Central South University of Technology》 EI 2008年第1期11-14,共4页
[SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied... [SiO2/FePt]5/Ag thin films were deposited by RF magnetron sputtering on the glass substrates and post annealing at 550 ℃ for 30 min in vacuum. Vibrating sample magnetometer and X-ray diffraction analyser were applied to study the magnetic properties and microstructures of the films. The results show that without Ag underlayer [SiO2/FePt]5 films deposited onto the glass are FCC disordered; with the addition of Ag underlayer [SiO]FePt]5/Ag films are changed into L10 and (111) mixed texture. The variation of the SiO2 nonmagnetic layer thickness in [SiO2/FePt]5/Ag films indicates that SiO2-doping plays an important role in improving the order parameter and the perpendicular magnetic anisotropy, and reducing the grain size and intergrain interactions. By controlling SiO2 thickness the highly perpendicular magnetic anisotropy can be obtained in the [SiO2 (0.6 nm)/FePt (3 nm)]5/Ag (50 nm) films and highly (001)-oriented films can be obtained in the [SiO2 (2 nm)/FePt (3 nm)]5/Ag (50 nm) films. 展开更多
关键词 [SiO2/FePt]5 multilayer films SiO2-doping Ag underlayer (001) orientation
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