单晶圆湿法清洗工艺中铝金属腐蚀问题研究

在集成电路制造中,湿法清洗工艺中铝金属腐蚀是一种致命缺陷,它的出现将引发产品的可靠性问题。通过控制清洗过程中的工艺参数,增加起侧壁保护作用的铝金属氧化层的厚度,从而抑制铝金属腐蚀缺陷的产生。随着清洗溶液温度的降低,晶圆清洗后6 h铝金属腐蚀缺陷数量明显减少;随着H_(2)SO_(4)标称质量分数由80%增加到105%,铝金属腐蚀缺陷数量减少;而H_(2)SO_(4)标称质量分数继续增加到115%时,铝金属腐蚀缺陷数量却增加。清洗溶液温度和H_(2)SO_(4)质量分数实验结果表明,更低的温度以及一定范围内的高H_(2)SO_(4)质量分数有利于促进铝金属氧化层的生成,强化侧壁保护,从而达到抑制铝金属腐蚀缺陷发生的目的。

Effect of pore structures on corrosion resistance of porous Ni_3Al intermetallics

Porous Ni3Al intermetallics were fabricated by elemental powder reactive synthesis method, using carbamide powders as space holders. Corrosion behavior of porous Ni3Al intermetallics was investigated in a 6 mol/L KOH solution using electrochemical methods and immersion test. Effect of porous structures on the corrosion behavior of the porous Ni3Al intermetallics was studied. The results indicate that the porous Ni3Al intermetallics with higher porosities suffer more serious corrosion than the ones with lower porosities because the complicated interconnected porous structures and the large true surface areas exist in the samples with a higher porosity. But the corrosion rates of the porous Ni3Al intermetallics are not proportional to the true surface areas. The reason is that the pore size, pore size distribution and pore shape of the porous Ni3Al intermetallics change with the increasing porosity. All the porous Ni3Al intermetallics with different porosities exhibit excellent corrosion resistance in a strong alkali solution.

Effect of additive BaO on corrosion resistance of xCu/(10NiO-NiFe_2O_4) cermet inert anodes for aluminum electrolysis

xCu/（10NiO-NiFe2O4） cermet and 1BaO-xCu/（10NiO-NiFe2O4） cermet（x=5,10,17） inert anodes were prepared as potential inert anodes for aluminum electrolysis and their corrosion resistance to traditional electrolyte was studied with anodic current density of 1.0 A/cm2 in laboratory electrolysis.The substantial corrosion of metal Cu was observed,many pores appeared on the surface of anode and electrolytes infiltrated inside anodes during the electrolysis.The wear rates of 5Cu/（10NiO-NiFe2O4）,10Cu/（10NiO-NiFe2O4）,17Cu/（10NiO-NiFe2O4）,1BaO-5Cu/（10NiO-NiFe2O4）,1BaO-10Cu/（10NiO-NiFe2O4） and 1BaO-17Cu/（10NiO-NiFe2O4） are 2.15,6.50,8.30,4.88,4.70 and 4.48 cm/a,respectively.The addition of BaO to 10Cu/（10NiO-NiFe2O4） cermet and 17Cu/（10NiO-NiFe2O4） cermet is advantageous because BaO can effectively promote densification and thus improve corrosion resistance.But the addition of BaO to 5Cu/（10NiO-NiFe2O4） cermet is unfavorable to corrosion resistance because additive BaO at the grain boundary of anode accelerates possibly the corrosion of cermet.

Corrosion resistance of 91W-6Ni-3Fe refractory metal,TiAl compound and iron based alloys in molten aluminum

The corrosion behaviors of 91W-6Ni-3Fe （91W） refractory alloy, TiAl intermetallic compound and two types of iron based alloys （QT700 and H13 tool steel） in a liquid aluminum were investigated. Corrosion experiments or static immersion-tests were carried out in pure molten aluminum at 750 ℃. The surface micro-topographies, corrosion interfaces and phase compositions of the immersed samples were investigated by 3D optical microscopy, SEM, EDS and XRD. The results show that 91W exhibits the best corrosion resistance, followed by QT700, H13 and TiAl alloy, consequently. The corrosion mass loss of the four metallic materials adheres to parabolic criterion, and the corrosion rate trends to be stable after initial acceleration. The diffusion-reaction mechanism is proposed for the dissolution of materials in molten aluminum, and the diffusion process is the rate-determining step during the dissolution of 91W in molten aluminum, while the low activation energy for the reaction between TiAl-（TiAl3）-Al couple results in poor corrosion resistance of TiAl alloy in molten aluminum.

Corrosion of NiFe_2O_4-10NiO-based cermet inert anodes for aluminium electrolysis

NiFe2O4-10NiO-based cermet inert anodes for aluminium electrolysis were prepared and their properties were investigated in a lab-scale electrolysis cell. The results show that the inert anodes exhibit good performance during electrolysis in molten salt cryolite at 960 °C, but according to the analyses of phase compositions and microstructures through XRD, SEM/EDX and metallographic analysis, the metal in the anodes is preferentially corroded and many pores are produced on the anode surface after electrolysis. The preferential dissolution of Fe in the NiFe2O4 phase may lead to the non-uniform corrosion of NiFe2O4 grains. Moreover, a dense protective layer of NiFe2O4-NiAl2O4-FeAl2O4 is formed on the anode surface, which originates from the reaction of Al2O3 dissolved in the electrolyte with NiO or FeO, the annexation of NiFe2O4-NiAl2O4-FeAl2O4 to NiO and volume expansion. Thus, the dense NiFe2O4-NiAl2O4-FeAl2O4 layer inhibits the metal loss and ceramic-phase corrosion on the surface of the cermet inert anodes.

Review on corrosion-wear resistance performance of materials in molten aluminum and its alloys

The failure caused by the corrosion-wear of molten aluminum and its alloys is one of the main problems in aluminum industry. In this work, the resistance behavior of various materials, including Fe-based alloys, ceramics and corresponding high apparatus of corrosion-wear in molten aluminum and its alloys, were reviewed. The synergistic effect of corrosion and wear was discussed based on corrosion and wear mechanics. The effects of dynamic agitation due to rotating of friction pairs, physical property of liquid metal and size of grain etc., on the corrosion-wear resistance performance were investigated. In addition, the characteristics of corrosion-wear resistance performance of materials in molten aluminum and its alloy were summarized. According to our recent progress referred to kinds of materials, especially a TiA13/Ti3A1C2/A1203 composite, the ceramics/metal composites with a co-continuous structure will be of great advantage in the field of corrosion-wear environment of molten aluminum and its alloys.

Comments on process of duplex coatings on aluminum alloys

Despite the great achievements made in improvement of wear resistance properties of aluminum alloys, their applications in heavy surface load-bearing are limited. Single coating is insufficient to produce the desired combination of surface properties. These problems can be solved through the duplex coatings. The aim of the present study is to overview the research advances on processes of duplex coatings on (aluminum) alloys combined with micro plasma oxidation process and with other modern processes such as physical vapour deposition and plasma assisted chemical vapour deposition and also to evaluate the performance of micro plasma oxidation coatings in improving the load-bearing, friction and wear resistance properties of aluminum alloys in comparison with other coatings. Wherein, a more detailed presentation of the processes and their performances and disadvantages are given as well.

Contrasting initial events of localized corrosion on surfaces of 2219-T42 and 6061-T6 aluminum alloys exposed in Caribbean seawater

Aluminum alloy samples, 6061-T6 and 2219-T42, were exposed to Caribbean seawater for 90 d. The fluctuations of open circuit potential, considered as electrochemical noise (EN), were used to characterize and compare initial pitting events, which appeared on their surfaces. EN analysis was carried out using the power spectral density (PSD) vs frequency. The decrease of the β exponent in PSD graphs indicated a release of spontaneous energy with the progress of pit formation in seawater. The fluctuations were associated with the breakdown and formation of new corrosion layers. The values of β exponent in PSD graphs suggest that corrosion process of AA2219-T42 alloy occurs as a persistent non-stationary process, the dynamics of which is controlled by fractional Brownian motion (fBm), while on AA6061-T6 alloy the corrosion process was dominated by stationary and weakly persistent features, with the contribution of fractional Gaussian noise (fGn). After the exposure in seawater, SEM-EDX analysis revealed insoluble intermetallic particles on the alloys, rich in Cu or Fe and irregularly distributed. The preferential dissolution of Mg and Al occurs from the S-phase (Al2CuMg) of AA2219-T42 alloy.

Corrosion leaking of preheater weldment in alumina factories

Stress corrosion cracking (SCC) and anticorrosion measures of TU42C weld-joint were studied by constant load experiments and pickling experiments. The results show that in 40%(mass fraction) NaOH solution at 110℃, caustic SCC occurs in TU42C weld-joints at the applied potential of-1020mV(vs SCE) for 3d while at the potential of-950mV(vs SCE) for 10d. All the cracks are intergranular. In the 10% sulfuric acid, the cracks have the most negative self-corrosion potential-432.5mV(vs SCE) and are active to be further corroded by the acid. Because of the same corrosion behaviour as the lab weldment, preheater’s cracking in alumina factories is attributed to the combining actions of previous caustic SCC in Bayer solutions and continuous acid corrosion by pickling with the addition of RD. The following measures are effective to prevent the corrosion failure of preheater, such as postweld heat treatment at 620℃ to relax the residual weld stress, addition of CC3 and L826 as the corrosion inhibitors to improve the pickling and cleaning by the high pressure water instead of by pickling.

Liquid metal corrosion sculpture to fabricate quickly complex patterns on aluminum

A liquid metal enabled corrosion sculpture technique for quickly fabricating complex pattems on aluminum substrate is proposed and experimentally demonstrated. According to the conceptual investigation, it is clarified that the width and the depth of a printed track are dominated by sculpture time and working temperature. The printed size can reach small values of 38 μm through controlling the sculpture time for 60 s. As the sculpture time was increased from 5 to 25 rain at 20℃, the depth of the fabricated pattern was improved from 13.3 to 25.6 μm. The sculptured depth of the pattern would increase from 13.3 to 106.9 μm when the sculpture time was fixed at 5 min and the temperature was raised from 20 to 60℃. To investigate the sculpture behavior in detail, the phases and microstructure of sculpture surface were quantitatively measured via a group of microscope imaging system with fundamental mechanisms interpreted. The present liquid metal sculpture method on aluminum substrate adds a new valuable soft tool for current metal engraving technology family.