In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system (MEMS) gyroscope are analyzed in principle. A novel drive circuit for...In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system (MEMS) gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop (PLL) in frequency control and an automatic gain control (AGC) method in amplitude control. A digital processing circuit with a field programmable gate array (FPGA) is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.展开更多
基金The National Natural Science Foundation of China(No. 60974116 )the Research Fund of Aeronautics Science (No.20090869007)Specialized Research Fund for the Doctoral Program of Higher Education (No. 200902861063)
文摘In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system (MEMS) gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop (PLL) in frequency control and an automatic gain control (AGC) method in amplitude control. A digital processing circuit with a field programmable gate array (FPGA) is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.