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Ni_uPt_(1-u)Si_vGe_(1-v)/Si_(0.72)Ge_(0.28)界面形貌的改善
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作者 杨鹏鹏 张青竹 +3 位作者 刘庆波 吴次南 闫江 徐烨峰 《半导体技术》 CAS CSCD 北大核心 2015年第1期49-52,67,共5页
针对锗硅在形成金属锗硅化物时存在部分应力释放、界面形貌特性变差的问题,提出了在Si0.72Ge0.28上分别外延薄硅(Si)覆盖层和锗硅(Si0.72Ge0.28)缓冲层的工艺方案。实验结果表明,通过两步快速热退火,两个方案的工艺条件都能形成低阻的Ni... 针对锗硅在形成金属锗硅化物时存在部分应力释放、界面形貌特性变差的问题,提出了在Si0.72Ge0.28上分别外延薄硅(Si)覆盖层和锗硅(Si0.72Ge0.28)缓冲层的工艺方案。实验结果表明,通过两步快速热退火,两个方案的工艺条件都能形成低阻的NiuPt1-uSivGe1-v和改善NiuPt1-uSivGe1-v/Si0.72Ge0.28的界面形貌。但相比较而言,在Si0.72Ge0.28上外延10 nm Si覆盖层的方案能够形成更好的NiuPt1-uSivGe1-v/Si0.72Ge0.28界面形貌。与没有改进的方案相比,该方案形成的肖特基接触更具有更低的肖特基接触势垒高度,更易形成欧姆接触。 展开更多
关键词 锗硅化物 界面形貌 两步快速热退火 肖特基势垒高度 欧姆接触
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Ab initio Study on Formation Mechanism of Spiro-Si-Heterocyclic Ring Compound Involving Ge from H2Ge=Si: and Formaldehyde
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作者 卢秀慧 王党生 明静静 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2016年第2期193-198,I0001,共7页
H2Ge=Si: and its derivatives (X2Ge=Si:, X=H, Me, F, C1, Br, Ph, Ar, ...) are new species. Its cycloaddition reactions are new area for the study of silylene chemistry. The cycloaddition reaction mechanism of singl... H2Ge=Si: and its derivatives (X2Ge=Si:, X=H, Me, F, C1, Br, Ph, Ar, ...) are new species. Its cycloaddition reactions are new area for the study of silylene chemistry. The cycloaddition reaction mechanism of singlet H2Ge=Si: and formaldehyde has been investigated with the MP2/aug-cc-pVDZ method. From the potential energy profile, it could be predicted that the reaction has one dominant reaction pathway. The reaction rule is that two reactants firstly form a four-membered Ge-heterocyclic ring silylene through the [2+2] cycloaddition reaction. Because of the 3p unoccupied orbital of Si: atom in the four-membered Ge-heterocyclic ring silylene and the π orbital of formaldehyde forming a π--p donor-acceptor bond, the four-membered Ge-heterocyclic ring silylene further combines with formaldehyde to form an intermediate. Because the Si: atom in the intermediate undergoes sp3 hybridization after transition state, then the intermediate isomerizes to a spiro-Si-heterocyclic ring compound involving Ge via a transition state. The result indicates the laws of cycloaddition reaction between H2Ge=Si: or its derivatives (X2Ge=Si:, X=H, Me, F, Cl, Br, Ph, Ar, ...) and asymmetric π-bonded compounds are significant for the synthesis of small-ring involving Si and Ge and spiro-Si-heterocyclic ring compounds involving Ge. 展开更多
关键词 H2Ge=Si: Four-membered Ge-heterocyclic ring silylene Spiro-Si-heterocyclicring compound Potential energy profile
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High Performance 70nm CMOS Devices
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作者 徐秋霞 钱鹤 +5 位作者 殷华湘 贾林 季红浩 陈宝钦 朱亚江 刘明 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第2期134-139,共6页
A high performance 70nm CMOS device has been demonstrated for the first time in the continent, China. Some innovations in techniques are applied to restrain the short channel effect and improve the driving ability, ... A high performance 70nm CMOS device has been demonstrated for the first time in the continent, China. Some innovations in techniques are applied to restrain the short channel effect and improve the driving ability, such as 3nm nitrided oxide, dual poly Si gate electrode, novel super steep retrograde channel doping by heavy ion implantation, ultra shallow S/D extension formed by Ge PAI(Pre Amorphism Implantation) plus LEI(Low Energy Implantation), thin and low resistance Ti SALICIDE by Ge PAI and special cleaning, etc. The shortest channel length of the CMOS device is 70nm. The threshold voltages, G m and off current are 0 28V,490mS·mm -1 and 0 08nA/μm for NMOS and -0 3V,340mS·mm -1 and 0 2nA/μm for PMOS, respectively. Delays of 23 5ps/stage at 1 5V, 17 5ps/stage at 2 0V and 12 5ps/stage at 3V are achieved in the 57 stage unloaded 100nm CMOS ring oscillator circuits. 展开更多
关键词 high performance 70nm CMOS device S/D extension nitrided gate oxide Ge PAI SALICIDE
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