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玻璃基底上铟锡氧化膜和锡氧化膜的刻蚀
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作者 Merin.,F 咏涛 《强激光技术进展》 1994年第5期24-27,共4页
关键词 锡氧化膜 锡氧化膜 刻蚀 玻璃基底
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透光导电ITO膜的制备及其光电特性的研究 被引量:16
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作者 周引穗 王俊 +4 位作者 杨晓东 董庆彦 高爱华 胡晓云 陆治国 《光子学报》 EI CAS CSCD 北大核心 2002年第9期1077-1080,共4页
采用溶胶 凝胶方法制备ITO膜 ,并从制备工艺上研究了各种因素对ITO膜光电特性的影响 最后制出的ITO膜厚度约为 5 0nm ,在可见光区平均透射比达 97% ,最高达 99.5 5 % ,电阻率在 2 .0Ω·cm左右 ,最低达到 0 .
关键词 制备 ITO 溶胶-凝胶 光电特性 氧化 透光导电
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真空和大气退火对 ITO 膜特性的影响 被引量:9
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作者 王德苗 黄士勇 +1 位作者 任高潮 陈抗生 《浙江大学学报(自然科学版)》 EI CSCD 1997年第4期533-538,共6页
ITO膜主要受溅射过程中溅射参数的影响.本文分析和验证真空和大气退火也改善和提高ITO的特性,根据我们的实验条件,本文主要研究退火工艺对ITO膜的面电阻、可见光透过率、热稳定性及晶向结构等特性的影响.
关键词 退火 透光率 晶向结构 氧化 大气退火
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Corrosion evolution of high-temperature formed oxide film on pure Sn solder substrate 被引量:2
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作者 Hui ZHAO Xu SUN +2 位作者 Long HAO Jian-qiu WANG Jing-mei YANG 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2022年第12期3998-4013,共16页
The evolution of morphology, composition, thickness and corrosion resistance of the oxide film on pure Sn solder substrate submitted to high-temperature aging in 150 °C dry atmosphere was investigated. The result... The evolution of morphology, composition, thickness and corrosion resistance of the oxide film on pure Sn solder substrate submitted to high-temperature aging in 150 °C dry atmosphere was investigated. The results indicate that high-temperature aging accelerates the dehydration of Sn(OH)_(4)in the pre-existing native oxide film to form SnO_(2)and facilitates the oxidation of fresh Sn substrate, resulting in the gradual increase in oxide film thickness and surface roughness with prolonging aging time. However, the corrosion resistance of the film initially is enhanced and then deteriorated with an extending aging time. Besides, the formation and evolution mechanisms of the oxide film with aging time were discussed. 展开更多
关键词 pure Sn solder oxide film high-temperature aging corrosion resistance
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Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering 被引量:2
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作者 杨加志 赵成刚 +3 位作者 刘晓丽 于俊伟 孙东平 唐卫华 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2011年第2期179-184,共6页
Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin ... Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction (XRD),scanning electron microscopy (SEM),atomic force mi-croscopy (AFM),and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O2/Ar,volume ratio) in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ~120 Ω·square-1 (Ω·sq-1)] and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml·min-1 (sccm) during the deposi-tion.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. 展开更多
关键词 thin films magnetron sputtering microbial cellulose membrane optical properties indium tin oxide
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Preparation and characterization of nanocrystalline SnO_2 thin film by electrodeposition technique 被引量:2
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作者 何则强 李新海 +4 位作者 熊利芝 麻明友 吴显明 肖卓炳 刘文萍 《Journal of Central South University of Technology》 EI 2005年第4期437-442,共6页
A novel process for preparing tin oxide thin films directly on copper foil by electrodeposition was developed. An optimal preparation technology to obtain SnOz thin films was proposed with current density of 8 mA/cm^2... A novel process for preparing tin oxide thin films directly on copper foil by electrodeposition was developed. An optimal preparation technology to obtain SnOz thin films was proposed with current density of 8 mA/cm^2, the time of deposition of 120 min, the concentration of tin dichloride of 0.02 mol/L and the concentration of dissociated acid of 0. 03 mol/L. The phase identification, microstructure and morphology of the thin films were investigated by thermogravimetric analysis and differential thermal analysis, X-ray diffraction, Fourier transform infrared spectra,scanning electron microscopy and transmission electron microscopy. The as-deposited thin film was composed of SnO2·xH2O was obtained by drying at room temperature. Nanocrystalline SnO2 thin film having tetragonal structure with average grain size in the range of 8 to 20 nm and porous, uniform surface was obtained by heat-treating the as-deposited film at 400 ℃ for 2 h. Electrochemical characterization shows that SnO2 film can deliver a discharge capacity of 798 mAh/g and the SnO2 film with smooth surface and annealed at 400 ℃ for 2 h has better cycle performance than that with rough surface and annealed at 150℃ for 10 h. 展开更多
关键词 tin oxidet film ELECTRODEPOSITION lithium ion battery electrochemical properties
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Oxygen Induced Limitation on Grain Growth in RF Sputtered Indium Tin Oxide Thin Films
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作者 Buddhi Sagar Lamsal Yung Huh +2 位作者 Mukul Dubey Manoj KC Qi Hua Fan 《Journal of Energy and Power Engineering》 2014年第7期1232-1236,共5页
ITO (indium tin oxide) thin films were deposited onto glass substrates by RF (radio frequency) magnetron sputtering to study variation of grain growth in pure argon and 99% argon plus 1% oxygen at different substr... ITO (indium tin oxide) thin films were deposited onto glass substrates by RF (radio frequency) magnetron sputtering to study variation of grain growth in pure argon and 99% argon plus 1% oxygen at different substrate temperatures. The average grain size increased with the increasing substrate temperature in pure argon. However, in oxygen presence environment the grain growth is limited at above 150 ℃. The films optoelectronic properties were evaluated. It was found that 200 nm ITO films prepared at 220 ℃ substrate temperature in pure argon possessed optimum sheet resistance of 10 Ω/sq. The transmittance oflTO films was enhanced with increasing the substrate temperature in pure argon but limited by the presence of excess oxygen. 展开更多
关键词 SPUTTERING thin film grain growth.
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A sintering-free, nanocrystalline tin oxide electron selective layer for organometal perovskite solar cells 被引量:3
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作者 赵晋津 魏丽玉 +4 位作者 刘金喜 王鹏 刘正浩 贾春媚 李江宇 《Science China Materials》 SCIE EI CSCD 2017年第3期208-216,共9页
Effective electron selective layer (ESL) is critical for the power conversion efficiency in organometal halide- based perovskite solar cells (PSCs). In this work, a spincoating process has been developed to fabric... Effective electron selective layer (ESL) is critical for the power conversion efficiency in organometal halide- based perovskite solar cells (PSCs). In this work, a spincoating process has been developed to fabricate high quality nanocrystalline SnO2 film at 100℃ without further sintering at higher temperature. When used as ESL in PSCs, such SnO2 film shows greater electron extraction ability and higher efficiency than TiO2 film processed under similar condition, as evidenced by the efficient time-resolved photoluminescence (TRPL) quenching SnO2/CH3NH3PbI3 film. As a resuit, the SnO2-based PSCs possess higher open circuit voltage of 0.91 V, short circuit current density of 20.73 mA cm^-2, and fill factor of 64.25%, corresponding to a conversion efficiency of 12.10%, compared with 7.16% of TiO2-based PSCs. This demonstrates the great potential of applying spin-coating sintering-free process for the low-cost and large-scale manufacturing of PSCs. 展开更多
关键词 LOW-TEMPERATURE sintering-free perovskite solar cells SnO2 electron-selective layer
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Preparation and characteristics of Nb-doped indium tin oxide thin films by RF magnetron sputtering 被引量:1
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作者 李士娜 马瑞新 +3 位作者 贺梁伟 肖玉琴 侯军刚 焦树强 《Optoelectronics Letters》 EI 2012年第6期460-463,共4页
Niobium-doped indium tin oxide (ITO:Nb) thin films are fabricated on glass substrates by radio frequency (RF) magnetron sputtering at different temperatures. Structural, electrical and optical properties of the f... Niobium-doped indium tin oxide (ITO:Nb) thin films are fabricated on glass substrates by radio frequency (RF) magnetron sputtering at different temperatures. Structural, electrical and optical properties of the films are investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), ultraviolet-visible (UV-VIS) spectroscopy and electrical measurements. XRD patterns show that the preferential orientation ofpolycrystalline structure changes from (400) to (222) crystal plane, and the crystallite size increases with the increase of substrate temperature. AFM analyses reveal that the film is very smooth at low temperature. The root mean square (RMS) roughness and the average roughness are 2.16 nm and 1.64 nm, respectively. The obtained lowest resistivity of the films is 1.2 × 10^4 Ω-cm, and the resistivity decreases with the increase of substrate temperature. The highest Hall mobility and carrier concentration are 16.5 cmVV.s and 1.88× 10^21 cm^-3, respectively. Band gap energy of the films depends on substrate temperature, which is varied from 3.49 eV to 3.63 eV. 展开更多
关键词 Atomic force microscopy Electric properties Indium compounds Magnetron sputtering NIOBIUM Optical properties Substrates Thin films Tin Tin oxides X ray diffraction
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Preparation and properties of solution-processed zinc tin oxide films from a new organic precursor 被引量:1
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作者 ZHAO YunLong,DUAN Lian,QIAO Juan,ZHANG DeQiang,DONG GuiFang,WANG LiDuo & QIU Yong Key Laboratory of Organic Optoelectronics & Molecular Engineering,Ministry of Education Department of Chemistry,Tsinghua University,Beijing 100084,China 《Science China Chemistry》 SCIE EI CAS 2011年第4期651-655,共5页
Transparent,smooth and dense zinc tin oxide (ZTO) thin films have been successfully produced by using a new precursor solution,zinc acetate and tin(II) 2-ethylhexanoate mixed with 2-ethanolamine in methoxyethanol.The ... Transparent,smooth and dense zinc tin oxide (ZTO) thin films have been successfully produced by using a new precursor solution,zinc acetate and tin(II) 2-ethylhexanoate mixed with 2-ethanolamine in methoxyethanol.The ZTO films have been prepared by spin-coating,followed by thermal treatment in oxygen atmosphere.The morphology,composition,crystallinity and band gap energy (Eg) of the ZTO thin films have been characterized by Atomic Force Microscopy (AFM),Atomic Emission Spectrometry (AES),X-ray Diffraction (XRD) and UV-vis spectrophotometry.The conductivity of ZTO is about 9.8×10-9 S/cm,as estimated from the current-voltage (I-V) curve.The effect of the thermal treatment process on the morphology of ZTO thin films is also discussed. 展开更多
关键词 zinc tin oxide (ZTO) solution-processed organic precursor thermal treatment process conductivity TRANSPARENT
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