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玻璃釉成膜工艺的改进 被引量:1
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作者 尤广为 邹建安 《集成电路通讯》 2012年第4期24-28,共5页
针对厚膜混合集成电路在高强度温度应力下出现成膜基板上元器件锡焊区附近导电带断裂现象,通过分析认为是材料膨胀系数不同及锡焊熔融导电带膜层所致,根据失效机理对玻璃釉成膜工艺进行了改进,在后续的工艺流片中锡焊区附近导电带未... 针对厚膜混合集成电路在高强度温度应力下出现成膜基板上元器件锡焊区附近导电带断裂现象,通过分析认为是材料膨胀系数不同及锡焊熔融导电带膜层所致,根据失效机理对玻璃釉成膜工艺进行了改进,在后续的工艺流片中锡焊区附近导电带未再次出现断裂现象,保证了厚膜混合集成电路质量和良品率。 展开更多
关键词 混合集成电路 基板 玻璃釉 锡焊膜层
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Corrosion evolution of high-temperature formed oxide film on pure Sn solder substrate 被引量:1
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作者 Hui ZHAO Xu SUN +2 位作者 Long HAO Jian-qiu WANG Jing-mei YANG 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2022年第12期3998-4013,共16页
The evolution of morphology, composition, thickness and corrosion resistance of the oxide film on pure Sn solder substrate submitted to high-temperature aging in 150 °C dry atmosphere was investigated. The result... The evolution of morphology, composition, thickness and corrosion resistance of the oxide film on pure Sn solder substrate submitted to high-temperature aging in 150 °C dry atmosphere was investigated. The results indicate that high-temperature aging accelerates the dehydration of Sn(OH)_(4)in the pre-existing native oxide film to form SnO_(2)and facilitates the oxidation of fresh Sn substrate, resulting in the gradual increase in oxide film thickness and surface roughness with prolonging aging time. However, the corrosion resistance of the film initially is enhanced and then deteriorated with an extending aging time. Besides, the formation and evolution mechanisms of the oxide film with aging time were discussed. 展开更多
关键词 pure Sn solder oxide film high-temperature aging corrosion resistance
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