Proposed herein is a novel non planar cell structure for flash memory which has been fabricated to achieve high programming speed with low operating voltage.This memory cell preserves a simple stacked gate structure ...Proposed herein is a novel non planar cell structure for flash memory which has been fabricated to achieve high programming speed with low operating voltage.This memory cell preserves a simple stacked gate structure which only requires an additional masking step to form the novel structure in the channel.For the cell of the 1 2μm gate length,the programming speed of 43μs under the measuring condition of V g=15V, V d=5V,and the erasing time of 24ms under V g=-5V, V s=8V are obtained.The programming speed is faster than that of the conventional planar cell structure.This superior programming speed makes it suitable for high speed application.展开更多
文摘Proposed herein is a novel non planar cell structure for flash memory which has been fabricated to achieve high programming speed with low operating voltage.This memory cell preserves a simple stacked gate structure which only requires an additional masking step to form the novel structure in the channel.For the cell of the 1 2μm gate length,the programming speed of 43μs under the measuring condition of V g=15V, V d=5V,and the erasing time of 24ms under V g=-5V, V s=8V are obtained.The programming speed is faster than that of the conventional planar cell structure.This superior programming speed makes it suitable for high speed application.
