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微隧道式加速度计的最优控制 被引量:1
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作者 刘益芳 吴德志 +2 位作者 郑高峰 杜晓辉 孙道恒 《光学精密工程》 EI CAS CSCD 北大核心 2013年第6期1561-1567,共7页
为了扩大隧道式加速度计(MTA)的动态测量范围并通过降低系统中的主要噪声来提高器件的性能,本文为隧道式加速度计(MTA)设计了线性二次高斯(LQG)控制器。推导了微隧道式加速度计的线性化状态-空间方程;依据分离定理,设计了卡尔曼滤波器... 为了扩大隧道式加速度计(MTA)的动态测量范围并通过降低系统中的主要噪声来提高器件的性能,本文为隧道式加速度计(MTA)设计了线性二次高斯(LQG)控制器。推导了微隧道式加速度计的线性化状态-空间方程;依据分离定理,设计了卡尔曼滤波器和最优状态反馈控制器;最后,在Matlab/Simulink中构建了由卡尔曼滤波器和最优状态控制器串联的LQG仿真系统并进行了动态和静态测试。仿真结果表明,LQG最优控制系统能够将微隧道式加速度计的带宽从2×103 rad/s扩大到3×106 rad/s。通过LQG最优控制,静态测试结果显示其静态隧道电流的波动从1nA~2.95nA降到0.73nA~1.14nA;动态实验数据表明其在方波加速度信号的作用下能够将隧道间隙维持在1nm。 展开更多
关键词 闭环微系统 隧道式加速度计 控制器设计 LQG控制器
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具有位移感知功能的超磁致伸缩微位移执行器的研究 被引量:5
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作者 贾振元 杨兴 +2 位作者 王福吉 郭东明 郭丽莎 《应用科学学报》 CAS CSCD 2002年第4期354-359,共6页
采用新型的功能材料——超磁致伸缩材料作为微位移器件 ,研制了一种具有位移感知功能的超磁致伸缩微位移执行器 ,并建立了其微位移闭环控制系统 .提出了一种高分辨率、无摩擦、传感 /位移传递一体化的圆形膜片式柔性结构 ,作为超磁致伸... 采用新型的功能材料——超磁致伸缩材料作为微位移器件 ,研制了一种具有位移感知功能的超磁致伸缩微位移执行器 ,并建立了其微位移闭环控制系统 .提出了一种高分辨率、无摩擦、传感 /位移传递一体化的圆形膜片式柔性结构 ,作为超磁致伸缩微位移执行器的微位移传递和感知机构 .应用薄板弯曲理论得出了相应的挠度、应变变化率的解析表达式及分布曲线 ,确定了微位移感知传感器的分布形式 ,实现了执行器的微位移感知功能 .同时 ,对研制的具有位移感知功能的超磁致伸缩微位移执行器及其微位移闭环控制系统进行实验研究 ,结果表明 :执行器的微位移感知灵敏度和系统的微位移闭环控制精度较高 . 展开更多
关键词 位移感知功能 超磁致伸缩 柔性结构 位移闭环控制系统 精密驱动
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Composite iterative learning controller design for gradually varying references with applications in an AFM system
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作者 方勇纯 张玉东 董晓坤 《Journal of Central South University》 SCIE EI CAS 2014年第1期180-189,共10页
Learning control for gradually varying references in iteration domain was considered in this research, and a composite iterative learning control strategy was proposed to enable a plant to track unknown iteration-depe... Learning control for gradually varying references in iteration domain was considered in this research, and a composite iterative learning control strategy was proposed to enable a plant to track unknown iteration-dependent trajectories. Specifically, by decoupling the current reference into the desired trajectory of the last trial and a disturbance signal with small magnitude, the learning and feedback parts were designed respectively to ensure fine tracking performance. After some theoretical analysis, the judging condition on whether the composite iterative learning control approach achieves better control results than pure feedback contro! was obtained for varying references. The convergence property of the closed-loop system was rigorously studied and the saturation problem was also addressed in the controller. The designed composite iterative learning control strategy is successfully employed in an atomic force microscope system, with both simulation and experimental results clearly demonstrating its superior performance. 展开更多
关键词 iterative learning control SATURATION feedback control feedforward control atomic force microscope
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Closed loop control design for the sense mode of micromachined vibratory gyroscopes 被引量:10
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作者 HE ChunHua ZHAO QianCheng +2 位作者 LIU YuXian YANG ZhenChuan YAN GuiZhen 《Science China(Technological Sciences)》 SCIE EI CAS 2013年第5期1112-1118,共7页
This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes.Specific theoretical deductions are performed to identify a precise linear model of the ope... This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes.Specific theoretical deductions are performed to identify a precise linear model of the open loop system of the sense mode,which is crucial for the PI controller design.The frequency responses obtained by experimental tests agree well with those calculated with the theoretical model,indicating the accuracy of the theoretical analyses.Experimental results demonstrate that the bandwidth of the closed loop is extended to 94.8 Hz from 2.3 Hz in the open loop and the quadrature signal is suppressed by about 64 dBV in the closed loop system.The overshoot and stable time in the step response of the closed loop system are measured to be about 15% and 35 ms,respectively.The mode-splitting gyroscope with the closed loop controlled sense mode achieves a scale factor of 41.0 mV/deg/s with nonlinearity of 0.09% and asymmetry of 1%,and a bias instability of 4.0 °/h with angle random walk of 0.171 deg/h1/2. 展开更多
关键词 MEMS vibratory gyroscope sense mode closed loop control linear model
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