针对微谐振式传感器闭环自激/检测系统中的波形变换电路输出TTL方波陡直性较差且要求输入信号幅值较大的缺点,提出一种改进的波形变换电路。该波形变换电路由电压比较器和模拟开关组成,电压比较器将输入的正弦信号转化为方波信号,控制...针对微谐振式传感器闭环自激/检测系统中的波形变换电路输出TTL方波陡直性较差且要求输入信号幅值较大的缺点,提出一种改进的波形变换电路。该波形变换电路由电压比较器和模拟开关组成,电压比较器将输入的正弦信号转化为方波信号,控制模拟开关产生陡直性更为优异的同频率方波。通过与分别基于施密特触发器和电压比较器的两种波形变换电路比较发现,该波形变换电路输出的方波陡直性最好,上升时间仅为5.6 ns。微谐振式传感器的输出信号经过放大滤波后,只要幅值超过25 m V,均可满足闭环自激/检测系统的要求。展开更多
A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reach...A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.展开更多
文摘针对微谐振式传感器闭环自激/检测系统中的波形变换电路输出TTL方波陡直性较差且要求输入信号幅值较大的缺点,提出一种改进的波形变换电路。该波形变换电路由电压比较器和模拟开关组成,电压比较器将输入的正弦信号转化为方波信号,控制模拟开关产生陡直性更为优异的同频率方波。通过与分别基于施密特触发器和电压比较器的两种波形变换电路比较发现,该波形变换电路输出的方波陡直性最好,上升时间仅为5.6 ns。微谐振式传感器的输出信号经过放大滤波后,只要幅值超过25 m V,均可满足闭环自激/检测系统的要求。
基金The National High Technology Research and Development Program of China (863Program)(No.2002AA812038)the National Defense Pre-Research Support Program (No.41308050109)
文摘A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.
