The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the form...The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.展开更多
文摘The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.