This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can ...This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.展开更多
文摘This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.
