MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structu...MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.展开更多
Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes f...Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes for the superconducting gyroscope （SCG） with eight detecting electrodes is analyzed. The model of the SCG rotor drift is established through dimensionless processing, linearization within micro-displacement and the least-square approach. Both the measurement scheme of the SCG rotor drift based on the model and its parameter relationship are presented. To guarantee the potential of the suspension rotor to be zero, the distributing scheme of four pairs of detecting electrodes is presented. The scheme can measure the magnitude and the direction of the rotor drift. The negative factors for affecting the measurement precision of .the SCG rotor drift and simulation results of the total effects are given. Simulation results show that the distributing capacitance of these differential capacitance sensors, the zero potential of the rotor and the model error are the major negative factors. The methods for eliminating those negative factors and the application range of the model are given. The model ensures the relationship between the output voltage and the rotor drift be linear.展开更多
Some construct characteristics and composing material of the new Gyro＇ s rotor are introduced. Some factors resulting in deformation of the rotor surface are analyzed. Under different loads such as the fo,＇ce of def...Some construct characteristics and composing material of the new Gyro＇ s rotor are introduced. Some factors resulting in deformation of the rotor surface are analyzed. Under different loads such as the fo,＇ce of deflecting center, the change of temperature, the fo,ce of pressure and couple factors, the deformation of rotor is analyzed with the wavelet finite element simulation software. The vector distributing map of rotor reformation is given. The deformation resulting from the pressure force of photon is studied. Finally, the influence on Gyro＇ s performance because of anomalous surface of rotor due to deformation of rotor is researched and the result is useful to forecast the performance of the drift of gyroscope. The disturbing moment resulting from the deformation of rotor can be compensated using the mathematic method, and provides an important reference for both design and optimization of the rotor.展开更多
Solid-state wave gyroscope is one kind of high-performance vibrating gyroscopes. The present work develops a new type of solid-state wave gyroscope—a ring vibrating gyroscope driven by piezo-electrodes located on the...Solid-state wave gyroscope is one kind of high-performance vibrating gyroscopes. The present work develops a new type of solid-state wave gyroscope—a ring vibrating gyroscope driven by piezo-electrodes located on the sidewall of the structure. It has advantages of large vibrating amplitude, high energy conversion efficiency and compact structure. The working principle of the piezoelectric ring vibrating gyroscope is based on the inertia effect of the standing wave in the axisymmetric resonator caused by Coriolis force. The finite element method(FEM) analysis has been implemented to characterize the ring type resonator. The prototypal gyroscope was manufactured and has been trimmed by mechanical way. The harmonic response of the ring vibrating gyroscope has been tested. The resonating frequency of the ring type resonator is 3715.6 Hz and the frequency split of the two working modes before trimming was about 5 Hz and was reduced to sub-0.01 Hz after trimming procedure. The Q-factor of the ring type resonator was 2504. Then, the turntable experiment was implemented. The measured scale factor k is 9.24 m V/[(°)·s] and the full scale range of the gyroscope is larger than ±300(°)/s.展开更多
文摘MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.
文摘Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes for the superconducting gyroscope （SCG） with eight detecting electrodes is analyzed. The model of the SCG rotor drift is established through dimensionless processing, linearization within micro-displacement and the least-square approach. Both the measurement scheme of the SCG rotor drift based on the model and its parameter relationship are presented. To guarantee the potential of the suspension rotor to be zero, the distributing scheme of four pairs of detecting electrodes is presented. The scheme can measure the magnitude and the direction of the rotor drift. The negative factors for affecting the measurement precision of .the SCG rotor drift and simulation results of the total effects are given. Simulation results show that the distributing capacitance of these differential capacitance sensors, the zero potential of the rotor and the model error are the major negative factors. The methods for eliminating those negative factors and the application range of the model are given. The model ensures the relationship between the output voltage and the rotor drift be linear.
文摘Some construct characteristics and composing material of the new Gyro＇ s rotor are introduced. Some factors resulting in deformation of the rotor surface are analyzed. Under different loads such as the fo,＇ce of deflecting center, the change of temperature, the fo,ce of pressure and couple factors, the deformation of rotor is analyzed with the wavelet finite element simulation software. The vector distributing map of rotor reformation is given. The deformation resulting from the pressure force of photon is studied. Finally, the influence on Gyro＇ s performance because of anomalous surface of rotor due to deformation of rotor is researched and the result is useful to forecast the performance of the drift of gyroscope. The disturbing moment resulting from the deformation of rotor can be compensated using the mathematic method, and provides an important reference for both design and optimization of the rotor.
基金Projects(51335011,51275522)supported by the National Natural Science Foundation of ChinaProject(HPCM-2013-08)supported by Key Lab Open Foundation of State Key Laboratory of High Performance(Complex Manufacturing),Central South University,China
文摘Solid-state wave gyroscope is one kind of high-performance vibrating gyroscopes. The present work develops a new type of solid-state wave gyroscope—a ring vibrating gyroscope driven by piezo-electrodes located on the sidewall of the structure. It has advantages of large vibrating amplitude, high energy conversion efficiency and compact structure. The working principle of the piezoelectric ring vibrating gyroscope is based on the inertia effect of the standing wave in the axisymmetric resonator caused by Coriolis force. The finite element method(FEM) analysis has been implemented to characterize the ring type resonator. The prototypal gyroscope was manufactured and has been trimmed by mechanical way. The harmonic response of the ring vibrating gyroscope has been tested. The resonating frequency of the ring type resonator is 3715.6 Hz and the frequency split of the two working modes before trimming was about 5 Hz and was reduced to sub-0.01 Hz after trimming procedure. The Q-factor of the ring type resonator was 2504. Then, the turntable experiment was implemented. The measured scale factor k is 9.24 m V/[(°)·s] and the full scale range of the gyroscope is larger than ±300(°)/s.
