Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an ...Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.展开更多
Towards integration of supply chain, manufacturing/production and investment decision making, this paper presents a hierarchical model architecture which contains six sub-models covering the areas of manufacturing con...Towards integration of supply chain, manufacturing/production and investment decision making, this paper presents a hierarchical model architecture which contains six sub-models covering the areas of manufacturing control, production operation, design and revamp, production management, supply chain and investment decision making. Six types of flow, material, energy, information, humanware, partsware and capital are clasified. These flows connect enterprise components/subsystems to formulate system topology and logical structure. Enterprise components/subsystems are abstracted to generic elementary and composite classes. Finally, the model architecture is applied to a management system of an integrated suply chain, and suggestion are made on the usage of the model architecture and further development of the model as well as implementation issues.展开更多
The concept of competitiveness influenced by many factors is analyzed in terms of terminology distinctions. This is the reason of numerous definitions of this term included in the first part of the paper, which varies...The concept of competitiveness influenced by many factors is analyzed in terms of terminology distinctions. This is the reason of numerous definitions of this term included in the first part of the paper, which varies according to the aspect of the analysis, analyzed marketing unit, tourism product, geographical unit, region, destination, or entities that offer an acceptable integrated product a package by specific indicators for comparison of elements of competitiveness. The first part of the article theoretically emphasizes the distinction in defining the concept of competitiveness from various aspects of the analyzed market subjects （different features and facilities provided）, and from those aspects of their specific business relationship in the market. Special contribution to the study of competitiveness is contained in the second part of the paper that analyzes the existing situation of intermediation in the European tourism market. This research is based on using the data of descriptive statistics and the secondary research which gives insights into the business of travel agencies, using the data such as number of employees, annual personnel costs, and the average annual cost per person employed in travel agencies in some European countries. The changes in the environment, and the competition initiate a need for an analysis of the internal environment, travel agencies＇ tasks, and their organizational structure. Also, the results conducted research on a sample of 500 travel agencies in 20 European countries indicate the dominance of quality service, price, and value for money as key factors of demand for achieving the competitiveness. It indicates new trends focused on needs for more specific--integrated tourist products that ensure the quality of service, value for money, and for the time that tourists invest in their obtaining.展开更多
文摘Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.
基金Supported by the National Natural Science Foundation of China (No. 79931000) and The State Major Basic Research Development Program (No. G20000263).
文摘Towards integration of supply chain, manufacturing/production and investment decision making, this paper presents a hierarchical model architecture which contains six sub-models covering the areas of manufacturing control, production operation, design and revamp, production management, supply chain and investment decision making. Six types of flow, material, energy, information, humanware, partsware and capital are clasified. These flows connect enterprise components/subsystems to formulate system topology and logical structure. Enterprise components/subsystems are abstracted to generic elementary and composite classes. Finally, the model architecture is applied to a management system of an integrated suply chain, and suggestion are made on the usage of the model architecture and further development of the model as well as implementation issues.
文摘The concept of competitiveness influenced by many factors is analyzed in terms of terminology distinctions. This is the reason of numerous definitions of this term included in the first part of the paper, which varies according to the aspect of the analysis, analyzed marketing unit, tourism product, geographical unit, region, destination, or entities that offer an acceptable integrated product a package by specific indicators for comparison of elements of competitiveness. The first part of the article theoretically emphasizes the distinction in defining the concept of competitiveness from various aspects of the analyzed market subjects （different features and facilities provided）, and from those aspects of their specific business relationship in the market. Special contribution to the study of competitiveness is contained in the second part of the paper that analyzes the existing situation of intermediation in the European tourism market. This research is based on using the data of descriptive statistics and the secondary research which gives insights into the business of travel agencies, using the data such as number of employees, annual personnel costs, and the average annual cost per person employed in travel agencies in some European countries. The changes in the environment, and the competition initiate a need for an analysis of the internal environment, travel agencies＇ tasks, and their organizational structure. Also, the results conducted research on a sample of 500 travel agencies in 20 European countries indicate the dominance of quality service, price, and value for money as key factors of demand for achieving the competitiveness. It indicates new trends focused on needs for more specific--integrated tourist products that ensure the quality of service, value for money, and for the time that tourists invest in their obtaining.
