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全方位抗过载的压阻式三轴加速度计 被引量:4
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作者 王军诚 吴艳红 +2 位作者 孙科 杨恒 李昕欣 《传感器与微系统》 CSCD 北大核心 2012年第11期87-90,共4页
针对加速度计在碰撞中过载失效的问题,提出了一种基于SoI的具有抗过载能力的压阻式三轴集成加速度计。加速度计采用三质量块结构,利用深反应离子刻蚀(DRIE)释放出来的间隙实现横向过载保护,同时利用SoI片,在硅〈100〉平面上通过KOH腐蚀... 针对加速度计在碰撞中过载失效的问题,提出了一种基于SoI的具有抗过载能力的压阻式三轴集成加速度计。加速度计采用三质量块结构,利用深反应离子刻蚀(DRIE)释放出来的间隙实现横向过载保护,同时利用SoI片,在硅〈100〉平面上通过KOH腐蚀硅〈110〉补偿条形成凸角实现纵向过载保护。封装后的加速度计利用激振台和落锤法进行了测试。测试结果表明:加速度计的三轴灵敏度分别为2.56,2.54,2.05 mV/gn,分辨率分别为0.53,0.87,0.77 mgn,三轴方向均具有超过3000 gn的抗过载能力。 展开更多
关键词 压阻式 三轴集成加速度计 绝缘体上硅 抗过载
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THL800型连续测斜仪
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作者 安永健 汤惠成 +1 位作者 刘岩 张玉峰 《石油仪器》 2011年第4期28-30,8,共3页
文章介绍THL800型连续测斜仪的基本测量原理,仪器构成及其主要特点。分析了新型集成加速度计的原理构造特点及其相比较传统石英加速度计的优势。新旧仪器的试验对比结果表明仪器的测量精度及抗震性能,使用的可靠性,维护的方便程度均有... 文章介绍THL800型连续测斜仪的基本测量原理,仪器构成及其主要特点。分析了新型集成加速度计的原理构造特点及其相比较传统石英加速度计的优势。新旧仪器的试验对比结果表明仪器的测量精度及抗震性能,使用的可靠性,维护的方便程度均有了显著的提高。 展开更多
关键词 连续测斜仪 集成加速度计 数字信号 误差补偿校正
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Design of Three-component Photoelastic Waveguide Accelerometer
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作者 GUO Feng TANG Dong-lin +1 位作者 LIU Ze-nian YANG Ling 《Semiconductor Photonics and Technology》 CAS 2008年第4期259-263,共5页
In order to realize a high accuracy seismic exploration in the high electro-magnetic field and to improve oil producibility and recovery efficiency,a three-component photoelastic waveguide accelerometer is designed. B... In order to realize a high accuracy seismic exploration in the high electro-magnetic field and to improve oil producibility and recovery efficiency,a three-component photoelastic waveguide accelerometer is designed. Based on the photoelastic effect,the Mach-Zehnder integrated optical interferometer is designed to measure the three-orthogonal components of acceleration and the combined three-component simple harmonic vibrator is designed to reduce the cross-talk among the acceleration components. According to the variation of LiNbO3 waveguide phase under the action of the applied acceleration,the cross-axise sensitivity and transverse sensitivity ratio(TSR) were analysed. The results reveal that the accelerometer has wide band and good linearity. It can satisfy the sensor requirements of high accuracy seismic exploration. The main design parameters of the geophone system are:phase sensitivity:1.86×10-4 Rad·m-1·s-2,natural frequency:3 500 Hz,and the transverse sensitivity ratio:0.11%. 展开更多
关键词 integrated optics ACCELEROMETER photoelastic effect LiNbO3 optical waveguide
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A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO_3 photoelastic waveguide
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作者 Dong-lin TANG Xiao-dong ZHANG +3 位作者 Guang-hui ZHAO Zhi-yong DAI Xin LAI Feng GUO 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2009年第4期595-600,共6页
An investigation of the properties ofa LiNbO3 photoelastic waveguide via the acceleration-induced effect is presented. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferom... An investigation of the properties ofa LiNbO3 photoelastic waveguide via the acceleration-induced effect is presented. A novel three-component hybrid-integrated optical accelerometer based on a Mach-Zehnder interferometer with a LiNbO3 photoelastic waveguide has been designed, which is capable of detecting seismic acceleration in high-accuracy seismic exploration. The Mach-Zehnder interferometer was successfully fabricated and a lighting test used to check its quality. The frequency response characteristic of the accelerometer was measured2 The accelerometer with a resonant frequency of 3549 Hz was demonstrated to show good linear frequency responding characteristics in the range of 100-3000 Hz. The accelerometer also shows good stability and consistency. Experimental results indicate that the outputs of the on- and cross-axis are 147 and 21.3 mV, respectively. 展开更多
关键词 Integrated optics ACCELEROMETER Photoelastic waveguide Mach-Zehnder interferometer (MZI)
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