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GaN基底上集成介电薄膜材料的生长方法研究 被引量:5
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作者 李言荣 朱俊 +2 位作者 罗文博 张万里 刘兴钊 《中国材料进展》 CAS CSCD 2012年第2期45-53,共9页
将以极化为特征、具有丰富功能特性的介电氧化物材料通过外延薄膜的方式,在半导体GaN上制备介电氧化物/GaN集成薄膜,其多功能一体化与界面耦合效应可推动电子系统单片集成化的进一步发展。然而,由于2类材料物理、化学性质的巨大差异,在... 将以极化为特征、具有丰富功能特性的介电氧化物材料通过外延薄膜的方式,在半导体GaN上制备介电氧化物/GaN集成薄膜,其多功能一体化与界面耦合效应可推动电子系统单片集成化的进一步发展。然而,由于2类材料物理、化学性质的巨大差异,在GaN上生长介电薄膜会出现严重的相容性生长问题。采用激光分子束外延技术(LMBE),通过弹性应变的TiO2的缓冲层来减小晶格失配度,降低介电薄膜生长温度,控制界面应变释放而产生的失配位错,提高了介电薄膜外延质量;通过低温外延生长MgO阻挡层,形成稳定的氧化物/GaN界面,阻挡后续高温生长产生的扩散反应;最终采用TiO2/MgO组合缓冲层控制介电/GaN集成薄膜生长取向、界面扩散,降低集成薄膜的界面态密度,保护GaN半导体材料的性能。所建立的界面可控的相容性生长方法,为相关集成器件的研发提供了一条可行的新途径。 展开更多
关键词 介电薄膜 GAN 缓冲层 界面控制 集成生长
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Epitaxial Growth of 150mm Silicon Epi\|Wafers for Advanced IC Applications 被引量:3
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作者 王启元 蔡田海 +1 位作者 郁元桓 林兰英 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2000年第5期426-430,共5页
With the device feature's size miniaturization in very large scale integrated circuit and ultralarge scale integrated circuit towards the sub\|micron and beyond level, the next generation of IC device requires s... With the device feature's size miniaturization in very large scale integrated circuit and ultralarge scale integrated circuit towards the sub\|micron and beyond level, the next generation of IC device requires silicon wafers with more improved electrical characteristics and reliability as well as a high perfection of the wafer surface. Compared with the polished wafer with a relatively high density of crystal originated defects (e. g. COPs), silicon epi\|wafers can meet such high requirements. The current development of researches on the 150mm silicon epi\|wafers for advanced IC applications is described. The P/P\++ CMOS silicon epi\|wafers were fabricated on a PE2061 Epitaxial Reactor (made by Italian LPE Company). The material parameters of epi\|wafers, such as epi\|defects, uniformity of thickness and resistivity, transition width, and minority carrier generation lifetime for epi\|layer were characterized in detail. It is demonstrated that the 150mm silicon epi\|wafers on PE2061 can meet the stringent requirements for the advanced IC applications. 展开更多
关键词 SILICON epitaxial growth
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Effect of Nitrogen Fertilizer on Growth Characteristics and Productivity of Creeping Forage Plants for Tree-Pasture Integrated System
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作者 R. Dianita L. Abdullah 《Journal of Agricultural Science and Technology(A)》 2011年第8期1118-1121,共4页
Sustainable forage production is one of the most important factors in livestock production system. Smallholder livestock production system is a part of agricultural practice in Indonesia. Limited land owned by farmers... Sustainable forage production is one of the most important factors in livestock production system. Smallholder livestock production system is a part of agricultural practice in Indonesia. Limited land owned by farmers was dominantly cultivated for food crops, and very small part of it used for cultivating forage plants. This leads to restriction of smallholder livestock development, because no more land available for forage production. Integrated forage production system by planting forage plants and food crops or trees in the same area becomes a considerable cropping system that widely practiced by the farmers in Indonesia. Some grasses and legumes have morphological advantages overcoming growth condition under shading. These growth characteristics are benefit in designing compatible system components for enhanced productivity in tree-pasture systems. Four potential shade-tolerant creeping forages that were combined with 2 levels of nitrogen application were tested using factorial completely randomized design 3 replicates. The first factor was species of creeping forages (stoloniferous): BH = Brachiaria humidicola, PN = Paspalum notatum, AC - Axonopus compressus and, AP = Arachis pintoi. The second factor was nitrogen (urea) fertilizer: A = without N fertilizer and B = with N fertilizer (300 kg Urea/ha). The observations included the growth rates of plant length, plant length, number of leaves, herbages yield (shoot), root dry weight, senescence, total N-shoot, N-soil and N-uptake. The results showed that growth characteristics and productivity of creeping forage plants was significantly differed by the species. Most species showed an increase in growth trend, except P. notatum. A. compressus significantly showed as the best performance species compared to other, in terms of growth rates, plant length, number of leaves, herbage yield (shoot) and root dry weight, N-uptake and N-shoot. This was lbllowed by B. humidicola, P. notatum, and A. pintoi. Based on previous study, A. compressus found as one of the native species in most tree system. It indicated its superior growth compared to other species tested. However, it is needed further research to observe the compatibility of each species in tree-pasture systems. 展开更多
关键词 Creeping forages growth characteristics tree-pasture system.
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An Empirical Study of China's Energy- Intensive Industries' Growth Based on Environmental Total Factor Productivity
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《China Economist》 2012年第2期37-49,共13页
Using directional distance function and nonparametric data envelopment analys&, th& paper estimates the environmental total factor productivity (ETFP) of energy-intensive industries in China from 1995 to 2010, and... Using directional distance function and nonparametric data envelopment analys&, th& paper estimates the environmental total factor productivity (ETFP) of energy-intensive industries in China from 1995 to 2010, and performs an empirical analysis on factors affecting ETFP growth after studying the differences of energy-intensive industries ' ETFP by industries and provinces. The findings include the following: energy-intensive industries 'ETFP growth is mainly driven by technical progress; China, at its current development stage, still has the potential to raise the productivity of its energy- intensive industries. By estimating the provincial data, we find that the ETFP growth of different provinces converge at different levels. Further market liberalization, increased FDl flows and reductions in energy intensity will help to improve each province's ETFP growth. In addition, increasing investment in energy saving and emissions reduction and improving corporate environmental management capacity can help to reduce a company's short-term cost of complying with environmental regulations. 展开更多
关键词 energy-intensive industries environmental pollution environmental total factorproductivity (TEFP) directional distance functionJEL: D24 047 Q55
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