The barrier to the copper diffusion is one of the key technologies in copper metallization. A novel barrier has been presented, which is a thin film of silicon oxynitride formed by implanting nitrogen into PECVD silic...The barrier to the copper diffusion is one of the key technologies in copper metallization. A novel barrier has been presented, which is a thin film of silicon oxynitride formed by implanting nitrogen into PECVD silicon dioxide. The method proved highly effective to block the copper diffusion after high frequency C V measurements at different BTS (Bias Thermal Stress) conditions and the XPS (X ray Photoelectron Spectroscopy) analysis. Furthermore, this method has the advantage of simplifying the damascene process of copper metallization, which has also been analyzed and discussed in detail.展开更多
ABC95 array computer is a multi-function network computer based on FPGA technology. A notable feature of ABC95 array computer is the support of complex interconnection, which determines that the computer must have eno...ABC95 array computer is a multi-function network computer based on FPGA technology. A notable feature of ABC95 array computer is the support of complex interconnection, which determines that the computer must have enough I/O band and flexible communications between Pes. The authors designed the interconnecting network chips of ABC95 and realized a form of multi-function interconnection. The multi-function interconnecting network supports conflict-free access from processors to memory matrix and the MESH network of enhanced processors to processor communications. The design scheme has been proved feasible by experiment.展开更多
文摘The barrier to the copper diffusion is one of the key technologies in copper metallization. A novel barrier has been presented, which is a thin film of silicon oxynitride formed by implanting nitrogen into PECVD silicon dioxide. The method proved highly effective to block the copper diffusion after high frequency C V measurements at different BTS (Bias Thermal Stress) conditions and the XPS (X ray Photoelectron Spectroscopy) analysis. Furthermore, this method has the advantage of simplifying the damascene process of copper metallization, which has also been analyzed and discussed in detail.
文摘ABC95 array computer is a multi-function network computer based on FPGA technology. A notable feature of ABC95 array computer is the support of complex interconnection, which determines that the computer must have enough I/O band and flexible communications between Pes. The authors designed the interconnecting network chips of ABC95 and realized a form of multi-function interconnection. The multi-function interconnecting network supports conflict-free access from processors to memory matrix and the MESH network of enhanced processors to processor communications. The design scheme has been proved feasible by experiment.
