The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating...The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.展开更多
Temperature distribution over the absorber plate of a parallel flow flat-plate solar collector is numerically analyzed. The governing differential equations with boundary conditions are solved numerically using fluent...Temperature distribution over the absorber plate of a parallel flow flat-plate solar collector is numerically analyzed. The governing differential equations with boundary conditions are solved numerically using fluent software. Effects of the inlet mass flux, inlet temperature and tube spacing on velocity and temperature distributions are discussed. Numerical results show that the distributions of velocity and temperature of fluid is unsymmetrical inside pipe.展开更多
A simple idea to obtain a desired color that hiding the black color, and the visibility of tubes and corrugations of the metal sheet （absorber） of the thermal solar collectors which is consider the main obstacle to ...A simple idea to obtain a desired color that hiding the black color, and the visibility of tubes and corrugations of the metal sheet （absorber） of the thermal solar collectors which is consider the main obstacle to facade integration buildings of solar thermal collectors will be presented in this study by designing a multilayer optical interference filter during RF magnetron sputtering process. This filter work as antireflection coating in the near IR region and also includes a high colored reflectance at a specific wavelength in the visible region, this is to gain an esthetic aspect for the thermal solar collector which can be used as building facades by employing appropriate dielectric materials with high refractive index （H） like SiO2 and low refractive index （L） such as MgF2 which they deposited on glass substrate for quarterwave thickness and for the optical model air//HL//glass.展开更多
文摘The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.
文摘Temperature distribution over the absorber plate of a parallel flow flat-plate solar collector is numerically analyzed. The governing differential equations with boundary conditions are solved numerically using fluent software. Effects of the inlet mass flux, inlet temperature and tube spacing on velocity and temperature distributions are discussed. Numerical results show that the distributions of velocity and temperature of fluid is unsymmetrical inside pipe.
文摘A simple idea to obtain a desired color that hiding the black color, and the visibility of tubes and corrugations of the metal sheet （absorber） of the thermal solar collectors which is consider the main obstacle to facade integration buildings of solar thermal collectors will be presented in this study by designing a multilayer optical interference filter during RF magnetron sputtering process. This filter work as antireflection coating in the near IR region and also includes a high colored reflectance at a specific wavelength in the visible region, this is to gain an esthetic aspect for the thermal solar collector which can be used as building facades by employing appropriate dielectric materials with high refractive index （H） like SiO2 and low refractive index （L） such as MgF2 which they deposited on glass substrate for quarterwave thickness and for the optical model air//HL//glass.
