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半导体器件的静电放电损伤及防护(上)
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作者 邓永孝 《质量与可靠性》 1989年第4期36-38,48,共4页
一、静电放电(ESD)的损伤模型 半导体器件在生产、封装、传递、试验、运输、整机调试及现场运行时,都可能因静电放电(ESD)损伤而失效,对MOS电路尤其如此。 随着高分子材料的广泛应用,半导体器件在生产、使用环境中绝缘材料日益增多,所... 一、静电放电(ESD)的损伤模型 半导体器件在生产、封装、传递、试验、运输、整机调试及现场运行时,都可能因静电放电(ESD)损伤而失效,对MOS电路尤其如此。 随着高分子材料的广泛应用,半导体器件在生产、使用环境中绝缘材料日益增多,所以半导体器件因静电放电引起的损伤日益严重。特别是大规模集成电路的发展,器件尺寸进一步减小,对ESD也更加敏感。 展开更多
关键词 半导体器件 静电放电损伤 器件模型 损伤模型 高分子材料 肖特基 保护电路 微电路 介质击穿 公共端
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半导体器件的静电放电损伤及防护(下)
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作者 邓永孝 《质量与可靠性》 1989年第5期31-34,共4页
本文主要介绍了为防止半导体器件静电损伤,在设计上所采取的几种保护电路,以及在制造、测试、试验、传递、包装、运输、使用等各个环节中防止产生静电的措施。
关键词 静电放电损伤 半导体器件 保护电路 保护网络 寄生电容 反向击穿 沟道长度 印制板 泄放 静电
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Effect and mechanism of on-chip electrostatic discharge protection circuit under fast rising time electromagnetic pulse
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作者 Mao Xinyi Chai Changchun +3 位作者 Li Fuxing Lin Haodong Zhao Tianlong Yang Yintang 《强激光与粒子束》 CAS CSCD 北大核心 2024年第10期44-52,共9页
The electrostatic discharge(ESD)protection circuit widely exists in the input and output ports of CMOS digital circuits,and fast rising time electromagnetic pulse(FREMP)coupled into the device not only interacts with ... The electrostatic discharge(ESD)protection circuit widely exists in the input and output ports of CMOS digital circuits,and fast rising time electromagnetic pulse(FREMP)coupled into the device not only interacts with the CMOS circuit,but also acts on the protection circuit.This paper establishes a model of on-chip CMOS electrostatic discharge protection circuit and selects square pulse as the FREMP signals.Based on multiple physical parameter models,it depicts the distribution of the lattice temperature,current density,and electric field intensity inside the device.At the same time,this paper explores the changes of the internal devices in the circuit under the injection of fast rising time electromagnetic pulse and describes the relationship between the damage amplitude threshold and the pulse width.The results show that the ESD protection circuit has potential damage risk,and the injection of FREMP leads to irreversible heat loss inside the circuit.In addition,pulse signals with different attributes will change the damage threshold of the circuit.These results provide an important reference for further evaluation of the influence of electromagnetic environment on the chip,which is helpful to carry out the reliability enhancement research of ESD protection circuit. 展开更多
关键词 fast rising time electromagnetic pulse damage effect electrostatic discharge protection circuit damage location prediction
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CMOS工艺中栅耦合ESD保护电路 被引量:6
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作者 杜鸣 郝跃 《西安电子科技大学学报》 EI CAS CSCD 北大核心 2006年第4期547-549,共3页
为了克服大尺寸静电放电损伤防护元件存在的不均匀导通情况,提出了一种改进的静电放电损伤保护电路方案.该方案利用栅漏交叠区的结扩散电容作为耦合元件,电容耦合作用使大尺寸元件在静电放电损伤事件发生时能够均匀导通,从而有效提高静... 为了克服大尺寸静电放电损伤防护元件存在的不均匀导通情况,提出了一种改进的静电放电损伤保护电路方案.该方案利用栅漏交叠区的结扩散电容作为耦合元件,电容耦合作用使大尺寸元件在静电放电损伤事件发生时能够均匀导通,从而有效提高静电放电损伤保护电路的抗静电能力. 展开更多
关键词 静电放电损伤 电容耦合 保护电路
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《质量与可靠性》1989年总要目
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《质量与可靠性》 1989年第6期55-56,共2页
关键词 质量与可靠性 全面质量管理 质量否决权 失效分析技术 半导体器件 静电放电损伤 航空航天工业部 管理手册 工艺评审 林宗棠
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Influence of mechanical damage generated by small space debris on electrostatic discharge
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作者 CAI Ming Hui LI Hong Wei HAN Jian Wei 《Science China Earth Sciences》 SCIE EI CAS CSCD 2016年第3期533-539,共7页
Recent studies have indicated that hypervelocity impacts by meteoroids and space debris can induce spacecraft anomalies. However, the basic physical process through which space debris impacts cause anomalies is not en... Recent studies have indicated that hypervelocity impacts by meteoroids and space debris can induce spacecraft anomalies. However, the basic physical process through which space debris impacts cause anomalies is not entirely clear. Currently, impact-generated plasma is thought to be the primary cause of electrical spacecraft anomalies, while the effects of impact-generated mechanical damage have rarely been researched. This paper presents new evidence showing that impact-generated mechanical damage strongly influences electrostatic discharge. Hypervelocity impact experiments were conducted in a plasma drag particle accelerator, using particles with diameters of 200–500 ?m and velocities of 2–7 km/s. The impact-generated mechanical damage on a specimen surface was measured by a stereoscopic microscope and 3D Profilometer and it indicated that microscopic irregularities around the impact crater could be responsible for local electric field enhancement. Furthermore, the influence of impact-generated mechanical damage on electrostatic discharge was simulated in an inverted potential gradient situation. The experimental results show that the electrostatic discharge voltage threshold was significantly reduced after the specimen was impacted by particles. 展开更多
关键词 Electrostatic discharge Small space debris Inverted potential gradient Spacecraft charging
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