A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabr...A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.展开更多
To improve the dust removal performance of the wet electrostatic precipitator(WESP), a flow field optimization scheme was proposed via CFD simulation in different scales. The simplified models of perforated and collec...To improve the dust removal performance of the wet electrostatic precipitator(WESP), a flow field optimization scheme was proposed via CFD simulation in different scales. The simplified models of perforated and collection plates were determined firstly. Then the model parameters for the resistance of perforated and collection plates, obtained by small-scale flow simulation, were validated by medium-scale experiments. Through the comparison of the resistance and velocity distribution between simulation results and experimental data, the simplified model is proved to present the resistance characteristics of perforated and collection plates accurately. Numerical results show that after optimization, both the flow rate and the pressure drop in the upper room of electric field regions are basically equivalent to those of the lower room, and the velocity distribution in flue inlet of WESP becomes more uniform. Through the application in practice, the effectiveness and reliability of the optimization scheme are proved, which can provide valuable reference for further optimization of WESP.展开更多
Nonlinear static analysis of piezoelectric plates has been carried out using nonlinear finite element method considering electro-mechanical coupling,The geometrical nonlinearity has been taken into account and electri...Nonlinear static analysis of piezoelectric plates has been carried out using nonlinear finite element method considering electro-mechanical coupling,The geometrical nonlinearity has been taken into account and electric potential is assumed to be quadratic across the plate thickness,The governing equations are obtained using potential energy and Hamilton's principle that includes elastic and piezoelectric effects.The finite element model is derived based on constitutive equation of piezoelectric material accounting for coupling between elasticity and electric effect using higher order plate elements,Results are presented for piezoelectric plate under different mechanical boundary conditions,Numerical results for the plate are given in dimensionless graphical forms.Effects of boundary conditions on linear and nonlinear response of the plate are also studied.The numerical results obtained by the present model are in good agreement with the available solutions reported in the literature.展开更多
文摘A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.
文摘To improve the dust removal performance of the wet electrostatic precipitator(WESP), a flow field optimization scheme was proposed via CFD simulation in different scales. The simplified models of perforated and collection plates were determined firstly. Then the model parameters for the resistance of perforated and collection plates, obtained by small-scale flow simulation, were validated by medium-scale experiments. Through the comparison of the resistance and velocity distribution between simulation results and experimental data, the simplified model is proved to present the resistance characteristics of perforated and collection plates accurately. Numerical results show that after optimization, both the flow rate and the pressure drop in the upper room of electric field regions are basically equivalent to those of the lower room, and the velocity distribution in flue inlet of WESP becomes more uniform. Through the application in practice, the effectiveness and reliability of the optimization scheme are proved, which can provide valuable reference for further optimization of WESP.
文摘Nonlinear static analysis of piezoelectric plates has been carried out using nonlinear finite element method considering electro-mechanical coupling,The geometrical nonlinearity has been taken into account and electric potential is assumed to be quadratic across the plate thickness,The governing equations are obtained using potential energy and Hamilton's principle that includes elastic and piezoelectric effects.The finite element model is derived based on constitutive equation of piezoelectric material accounting for coupling between elasticity and electric effect using higher order plate elements,Results are presented for piezoelectric plate under different mechanical boundary conditions,Numerical results for the plate are given in dimensionless graphical forms.Effects of boundary conditions on linear and nonlinear response of the plate are also studied.The numerical results obtained by the present model are in good agreement with the available solutions reported in the literature.
