This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can ...This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.展开更多
This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity a...This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.展开更多
Y2002-63066-428 0210360低成本商用4开关三相无刷直流电动机的可行性论证:拓扑与控制=On the feasibility of four-switch three-phase BLDC motor drives for low cost commercial appli-cations:topology and control〔会,英〕/Lee,B...Y2002-63066-428 0210360低成本商用4开关三相无刷直流电动机的可行性论证:拓扑与控制=On the feasibility of four-switch three-phase BLDC motor drives for low cost commercial appli-cations:topology and control〔会,英〕/Lee,B.K.&Kim,T.H.//Sixteenth Annual IEEE Applied PowerElectronics Conference and Exposition,Volume 1.-428～433(PE)展开更多
文摘This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.
文摘This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.
文摘Y2002-63066-428 0210360低成本商用4开关三相无刷直流电动机的可行性论证:拓扑与控制=On the feasibility of four-switch three-phase BLDC motor drives for low cost commercial appli-cations:topology and control〔会,英〕/Lee,B.K.&Kim,T.H.//Sixteenth Annual IEEE Applied PowerElectronics Conference and Exposition,Volume 1.-428～433(PE)
