A novel approximation of the two-dimensional （2D） potential function perpendicular to the channel is proposed,and then an analytical threshold voltage model for a fully depleted SOI-MOSFET with a non-uniform Gaussia...A novel approximation of the two-dimensional （2D） potential function perpendicular to the channel is proposed,and then an analytical threshold voltage model for a fully depleted SOI-MOSFET with a non-uniform Gaussian distribution doping profile is given based on this approximation. The model agrees well with numerical simulation by MEDICI. The result represents a new way and some reference points in analyzing and controlling the threshold voltage of non-uniform fully depleted （FD） SOI devices in practice.展开更多
Prediction of channel dredging volume is critical for project cost estimation. However, many proposed approximate methods are not accurate. This paper presents a novel numerical method to accurately calculate the dred...Prediction of channel dredging volume is critical for project cost estimation. However, many proposed approximate methods are not accurate. This paper presents a novel numerical method to accurately calculate the dredg- ing volume using a 3D stratum model (DSM) and a channel surface model. First, the 3D DSM is constructed rapidly yet accurately from non-uniform rational B-splines (NURBS) surfaces through Boolean operation between a physical terrain model and a stratum surfaces model. Then, a parametric channel surface model is built from cross-section data and a channel center line using code implemented in the VC++ programming language. Finally, the volumes of different types of physical stratums can be calculated automatically and hierarchically to determine the dredging volume. Practical application shows that the DSM method is more precise and faster compared to the section method, and that the implementation of the developed software provides an interactive graphical user interface and visual presentation.展开更多
A finite element analysis(FEA)model is developed for the chemical-mechanical polishing(CMP)process on the basis of a 12-in five-zone polishing head.The proposed FEA model shows that the contact stress non-uniformity i...A finite element analysis(FEA)model is developed for the chemical-mechanical polishing(CMP)process on the basis of a 12-in five-zone polishing head.The proposed FEA model shows that the contact stress non-uniformity is less dependent on the material property of the membrane and the geometry of the retaining ring.The larger the elastic modulus of the pad,the larger contact stress non-uniformity of the wafer.The applied loads on retaining ring and zone of the polishing head significantly affect the contact stress distribution.The stress adjustment ability of a zone depends on its position.In particular,the inner-side zone has a high stress adjustment ability,whereas the outer-side zone has a low stress adjustment ability.The predicted results by the model are shown to be consistent with the experimental data.Analysis results have revealed some insights regarding the performance of the multi-zone CMP.展开更多
文摘A novel approximation of the two-dimensional （2D） potential function perpendicular to the channel is proposed,and then an analytical threshold voltage model for a fully depleted SOI-MOSFET with a non-uniform Gaussian distribution doping profile is given based on this approximation. The model agrees well with numerical simulation by MEDICI. The result represents a new way and some reference points in analyzing and controlling the threshold voltage of non-uniform fully depleted （FD） SOI devices in practice.
基金Supported by the Science Fund for Creative Research Groups of the National Natural Science Foundation of China (No. 51021004)National Natural Science Foundation of China(No. 50879056)National Key Technologies R&D Program in the 12th Five-Year Plan of China(No. 2011BAB10B06)
文摘Prediction of channel dredging volume is critical for project cost estimation. However, many proposed approximate methods are not accurate. This paper presents a novel numerical method to accurately calculate the dredg- ing volume using a 3D stratum model (DSM) and a channel surface model. First, the 3D DSM is constructed rapidly yet accurately from non-uniform rational B-splines (NURBS) surfaces through Boolean operation between a physical terrain model and a stratum surfaces model. Then, a parametric channel surface model is built from cross-section data and a channel center line using code implemented in the VC++ programming language. Finally, the volumes of different types of physical stratums can be calculated automatically and hierarchically to determine the dredging volume. Practical application shows that the DSM method is more precise and faster compared to the section method, and that the implementation of the developed software provides an interactive graphical user interface and visual presentation.
基金supported by the Science Fund for Creative Research Groups (Grant No. 51021064)the National Natural Science Foundation of China (Grant No. 51205226)the China Postdoctoral Science Foundation (Grant No. 2012M510420)
文摘A finite element analysis(FEA)model is developed for the chemical-mechanical polishing(CMP)process on the basis of a 12-in five-zone polishing head.The proposed FEA model shows that the contact stress non-uniformity is less dependent on the material property of the membrane and the geometry of the retaining ring.The larger the elastic modulus of the pad,the larger contact stress non-uniformity of the wafer.The applied loads on retaining ring and zone of the polishing head significantly affect the contact stress distribution.The stress adjustment ability of a zone depends on its position.In particular,the inner-side zone has a high stress adjustment ability,whereas the outer-side zone has a low stress adjustment ability.The predicted results by the model are shown to be consistent with the experimental data.Analysis results have revealed some insights regarding the performance of the multi-zone CMP.
