期刊文献+
共找到2篇文章
< 1 >
每页显示 20 50 100
电子束直写中X射线光刻掩模的热形变研究
1
作者 尚鸿雁 王永坤 《微细加工技术》 2007年第5期10-13,25,共5页
对X射线掩模电子束制备图形过程建立三维有限元模型,提出用热流密度等效法简化瞬态热应力计算,得到了X射线掩模在电子束直写过程中的瞬态热形变。结果表明,掩模面内形变在直写过程中出现振荡变化,最大值为8.24 nm,方向背离电子束光照中... 对X射线掩模电子束制备图形过程建立三维有限元模型,提出用热流密度等效法简化瞬态热应力计算,得到了X射线掩模在电子束直写过程中的瞬态热形变。结果表明,掩模面内形变在直写过程中出现振荡变化,最大值为8.24 nm,方向背离电子束光照中心,掩模面外形变最大值为9.75μm,方向沿图形窗口法线方向,并出现在电子束束斑中心。 展开更多
关键词 面内形变 形变 电子束直写 图形制备 有限元分析
下载PDF
THRUST NAPPE STRUTRUE IN THE JINGGANG MOUNTAIN: CHARACTERISTICS AND SIGNIFICANCE FOR PROSPECTION OF ORE DEPOSITS
2
作者 CUI Xuejun, XIA Bin and ZHOU Jibin(Key Laboratory of Marginal Sea Geology, Guangzhou Institute of Geochemistry & South ChinaSea Institute of Oceanology, Chinese Academy of Sciences, Guangzhou, GD 510640, China Jiangxi Institute of Geological Survey, Nanchang, JX 330201, China) 《Geotectonica et Metallogenia》 2003年第1期1-10,共10页
Nappe structure, as was first discovered by the authors during the regional geological survey at the scale of 1:50,000 in The Jinggang Mountain, is mainly comprised of a series of NNE-NE-striking thrust fault zones an... Nappe structure, as was first discovered by the authors during the regional geological survey at the scale of 1:50,000 in The Jinggang Mountain, is mainly comprised of a series of NNE-NE-striking thrust fault zones and thrust sheets among them. Sinian, Cambrian, Ordovician, Devonian, Carboniferous,Triassic, Jurassic and Cretaceous strata are involved in the thrust nappe system. The nappe structure is of the type of duplex structures formed as a result of the earlier stage migration from SE to NW and late stage migration from E to W of sedimentary cover or basement strata. Formation of the nappe structure in the studied area involves two main epochs: Early Yanshanian and Late Yanshanian to Early Himalayan. The mineral deposits and the buried coalfields in the area, especially the latter, are extensively controlled by the nappe structure. 展开更多
关键词 thrust nappe structure Mesozoic inland deformation the Jinggang Mountain.
下载PDF
上一页 1 下一页 到第
使用帮助 返回顶部