Titanium nitride thin films were deposited on silicon by high power impulse magnetron sputtering(HiPIMS)method at different frequencies(162-637 Hz)and pulse-on time(60-322μs).Response surface methodology(RSM)was empl...Titanium nitride thin films were deposited on silicon by high power impulse magnetron sputtering(HiPIMS)method at different frequencies(162-637 Hz)and pulse-on time(60-322μs).Response surface methodology(RSM)was employed to study the simultaneous effect of frequency and pulse-on time on the current waveforms and the crystallographic orientation,microstructure,and in particular,the deposition rate of titanium nitride at constant time and average power equal to 250 W.The crystallographic structure and morphology of deposited films were analyzed using XRD and FESEM,respectively.It is found that the deposition rate of HiPIMS samples is tremendously dependent on pulse-on time and frequency of pulses where the deposition rate changes from 4.5 to 14.5 nm/min.The regression equations and analyses of variance(ANOVA)reveal that the maximum deposition rate(equal to(17±0.8)nm/min)occurs when the frequency is 537 Hz and pulse-on time is 212μs.The experimental measurement of the deposition rate under this condition gives rise to the deposition rate of 16.7 nm/min that is in good agreement with the predicted value.展开更多
In order to study the law of mining subsidence and ground movement, to provide the basis of coal mining under building, railway and water, we used the probability integration method to make comprehensive evaluation of...In order to study the law of mining subsidence and ground movement, to provide the basis of coal mining under building, railway and water, we used the probability integration method to make comprehensive evaluation of ground stability. Take Yingcheng Coal Mine of Jiutai as an example. Mining-induced movement and horizontal movement are analyzed on the basis of the measurement data. The resuhs of prediction can pro- vide reference and basis for prevention of coal mining subsidence and future restoration and treatment.展开更多
The photoabsorption cross sections of condensed atoms and molecules have proven to be dependent not only on the imaginary parts but also on the real parts of the polarizabilities due to the strong interatomie interact...The photoabsorption cross sections of condensed atoms and molecules have proven to be dependent not only on the imaginary parts but also on the real parts of the polarizabilities due to the strong interatomie interactions in condensed environment. The real parts of the polarizabilities calculated usually by using the famous Kramers-Kronig transformation （KKT） from the photoabsorption cross sections of the isolated atoms are very sensitive to the accuracy of the implementation method of the infinite integral in the KKT. The influence of the integral instability of the KKT and the real part of the polarizability on the variation of the photoabsorption cross sections with the number density and the structure of the condensed matter has been studied in the present work for the first time. The conclusion is that the integration method with interpolation has given more reasonable results than the direct truncation method if some appropriate interpolation functions have been used. Some notes and conclusions have also been given for the applications of the alternative coupled expressions of photoabsorption cross sections.展开更多
文摘Titanium nitride thin films were deposited on silicon by high power impulse magnetron sputtering(HiPIMS)method at different frequencies(162-637 Hz)and pulse-on time(60-322μs).Response surface methodology(RSM)was employed to study the simultaneous effect of frequency and pulse-on time on the current waveforms and the crystallographic orientation,microstructure,and in particular,the deposition rate of titanium nitride at constant time and average power equal to 250 W.The crystallographic structure and morphology of deposited films were analyzed using XRD and FESEM,respectively.It is found that the deposition rate of HiPIMS samples is tremendously dependent on pulse-on time and frequency of pulses where the deposition rate changes from 4.5 to 14.5 nm/min.The regression equations and analyses of variance(ANOVA)reveal that the maximum deposition rate(equal to(17±0.8)nm/min)occurs when the frequency is 537 Hz and pulse-on time is 212μs.The experimental measurement of the deposition rate under this condition gives rise to the deposition rate of 16.7 nm/min that is in good agreement with the predicted value.
文摘In order to study the law of mining subsidence and ground movement, to provide the basis of coal mining under building, railway and water, we used the probability integration method to make comprehensive evaluation of ground stability. Take Yingcheng Coal Mine of Jiutai as an example. Mining-induced movement and horizontal movement are analyzed on the basis of the measurement data. The resuhs of prediction can pro- vide reference and basis for prevention of coal mining subsidence and future restoration and treatment.
基金Supported by the Natural Science Foundations of Ludong University under Grant Nos.22270301 and L20072804
文摘The photoabsorption cross sections of condensed atoms and molecules have proven to be dependent not only on the imaginary parts but also on the real parts of the polarizabilities due to the strong interatomie interactions in condensed environment. The real parts of the polarizabilities calculated usually by using the famous Kramers-Kronig transformation （KKT） from the photoabsorption cross sections of the isolated atoms are very sensitive to the accuracy of the implementation method of the infinite integral in the KKT. The influence of the integral instability of the KKT and the real part of the polarizability on the variation of the photoabsorption cross sections with the number density and the structure of the condensed matter has been studied in the present work for the first time. The conclusion is that the integration method with interpolation has given more reasonable results than the direct truncation method if some appropriate interpolation functions have been used. Some notes and conclusions have also been given for the applications of the alternative coupled expressions of photoabsorption cross sections.
