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石英衬底上生长的高光学质量的纳米金刚石薄膜 被引量:16
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作者 邱东江 石成儒 吴惠桢 《物理学报》 SCIE EI CAS CSCD 北大核心 2002年第8期1870-1874,共5页
采用射频等离子体增强的热丝化学气相沉积 (RF HFCVD)技术在石英玻璃衬底上制备了表面光滑、晶粒致密均匀的纳米金刚石薄膜 .用扫描电子显微镜 (SEM)和台阶仪观测薄膜的表面形貌和粗糙度 ,x射线衍射 (XRD)和Raman光谱表征膜层的结构 ,... 采用射频等离子体增强的热丝化学气相沉积 (RF HFCVD)技术在石英玻璃衬底上制备了表面光滑、晶粒致密均匀的纳米金刚石薄膜 .用扫描电子显微镜 (SEM)和台阶仪观测薄膜的表面形貌和粗糙度 ,x射线衍射 (XRD)和Raman光谱表征膜层的结构 ,并用紫外 可见 近红外光谱仪测量其光透过率 .实验结果表明 ,衬底温度、反应气压及射频功率对金刚石膜的结晶习性、表面粗糙度及光透过率均有很大程度的影响 ,其最佳值分别为 70 0℃ ,2× 133Pa和 2 0 0W .在该最佳参量下经 1h的生长即获得连续、平滑的纳米金刚石膜 ,其平均晶粒尺寸为约 2 5nm ,表面平均粗糙度仅为 5 5nm ,在近红外区的光透过率高达 90 % 展开更多
关键词 石英衬底 高光学质量 纳米金刚石薄膜 射频等离子体增强热丝化学气相沉积 光透过率 外延生长
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Design and Simulation of High-power LED Array Packaging 被引量:3
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作者 TIAN Da-lei GUAN Rong-feng WANG Xing 《Semiconductor Photonics and Technology》 CAS 2008年第1期56-60,共5页
Thermal management is one of the key technologies for high-power Light emitting diode(LED)entering into the general illuminating field.Successful thermal management depends on optimal packaging structure and selected ... Thermal management is one of the key technologies for high-power Light emitting diode(LED)entering into the general illuminating field.Successful thermal management depends on optimal packaging structure and selected packaging materials.In this paper,the aluminum is employed as a substrate of LED,3×3 array chips are placed on the substrate,heat dissipation performance is simulated using finite element analysis(FEA)software,analyzed are the influences on the temperature of the chip with different convection coefficient,and optical properties are simulated using optical analysis software.The results show that the packaging structure can not only effectually improve the thermal performance of high-power LED array but also increase the light extraction efficiency. 展开更多
关键词 high-power LED thermal management optical properties SIMULATION
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