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电子束纳米焊接与纳米切割 被引量:4
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作者 许胜勇 《电子显微学报》 CAS CSCD 2007年第6期563-569,共7页
对小到1nm大到100nm的"纳米尺度",目前并没有成熟的原位物理加工技术。我们演示高强度电子束技术在纳米尺度上应用于原位物理加工的潜力,将高亮度场发射透射电子显微镜的电子束汇聚到直径1nm左右,可得到强度为106A/cm2量级的... 对小到1nm大到100nm的"纳米尺度",目前并没有成熟的原位物理加工技术。我们演示高强度电子束技术在纳米尺度上应用于原位物理加工的潜力,将高亮度场发射透射电子显微镜的电子束汇聚到直径1nm左右,可得到强度为106A/cm2量级的电子束。这样的电子束可被用来在直径几十纳米的单根金属或硅纳米线上实现结构修饰,切割出小孔、窄桥及缝隙等各类纳米尺度的图案结构。强度稍弱的电子束则可被用来实现在金属纳米线之间,或者金属纳米线与硅纳米线之间的焊接,也可被用于去除纳米线表面的氧化层。这些物理加工机制涉及高能电子穿越固体时各类非弹性散射造成的加热、非晶化、溅射、等离子气化等非线性效应。作为一项无污染且作用范围非常局域化的原位技术,它可直接应用于纳米结和纳米器件的修饰与制备。 展开更多
关键词 纳米焊接 纳米切割 高强度电子束
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High temperature cyclic oxidation behavior of Y_2O_3-ZrO_2 thermal barrier coatings irradiated by high-intensity pulsed ion beam
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作者 王一奇 雷明凯 +1 位作者 AFSAR A M SONG J I 《Journal of Central South University》 SCIE EI CAS 2009年第1期13-17,共5页
The high-temperature oxidation resistance behavior of 7% (mass fraction) Y203-ZrO2 thermal barrier coatings (TBCs) irradiated by high-intensity pulsed ion beam (HIPIB) was investigated under the cyclic oxidation... The high-temperature oxidation resistance behavior of 7% (mass fraction) Y203-ZrO2 thermal barrier coatings (TBCs) irradiated by high-intensity pulsed ion beam (HIPIB) was investigated under the cyclic oxidation condition of 1 050 ℃ and 1 h. The columnar grains in the TBCs disappear after the HIPIB irradiation at ion current densities of 100-200 A/cm^2 and the irradiated surface becomes smooth and densified after remelting and ablation due to the HIPIB irradiation. The thermally grown oxide (TGO) layer thickness of the irradiated TBCs is smaller than that of the original TBCs. After 15 cycles, the mass gains of the original TBCs and those irradiated by ion current densities of 100 and 200 A/cm^2 due to the oxidation are found to be 0.8-0.9, 0.6-0.7, and 0.3-0.4 mg/cm^2, respectively. The inward diffusion of oxygen through the irradiated TBCs is significantly impeded by the densified top layer formed due to irradiation, which is the main reason for the improved overall oxidation resistance of the irradiated TBCs. 展开更多
关键词 Y2O3 ZRO2 thermal barrier coating high-intensity pulsed ion beam electron beam physical vapor deposition oxidation resistance cyclic oxidation
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