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应用于石墨烯MEMS高温压力传感器的气密封装研究 被引量:1
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作者 陈绪文 王俊强 吴天金 《电子元件与材料》 CAS CSCD 北大核心 2022年第5期508-513,共6页
针对石墨烯MEMS高温压力传感器的高气密要求,设计了一种压膜结构压力传感器,并利用Au-Au键合完成压力传感器的封装。键合前,样品表面采用Ar等离子体预处理,随后在N_(2)氛围下,利用倒装焊机在1.6 kN压力、300℃温度下键合30 min完成键合... 针对石墨烯MEMS高温压力传感器的高气密要求,设计了一种压膜结构压力传感器,并利用Au-Au键合完成压力传感器的封装。键合前,样品表面采用Ar等离子体预处理,随后在N_(2)氛围下,利用倒装焊机在1.6 kN压力、300℃温度下键合30 min完成键合工艺。对键合指标进行表征测试,发现器件的最小剪切强度为10.87 MPa,最大泄漏率为9.88×10^(-4) Pa·cm^(3)/s,均满足GJB 548B-2005的要求。在300℃下高温存储(HTS)10 h后,器件的平均剪切强度和泄漏率变化不大,通过传感器压力静态测试发现石墨烯器件在0~60 MPa压力量程内具备高重复性,证明石墨烯在键合过程和高温存储实验后没有变性。实验结果表明Au-Au键合可以完成石墨烯MEMS高温压力传感器高气密封装。 展开更多
关键词 石墨烯 Au-Au键合 高气密封 MEMS高温压力传感器
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高储层压力区块生产套管柱优化设计及配套套管的开发与制造 被引量:4
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作者 姜玉梅 卢小庆 罗蒙 《钢管》 CAS 2019年第2期29-34,共6页
针对克深气田克深13等新勘探开发区块储层埋藏深、地层压力高、关井压力高达110MPa的难点,对塔标Ⅱ号井身的套管柱结构进行了优化设计,并开发了配套的Ф206.38mmx17.25mm BG140V BGT2的非API规格高强度、高韧性、高气密性套管。优化设... 针对克深气田克深13等新勘探开发区块储层埋藏深、地层压力高、关井压力高达110MPa的难点,对塔标Ⅱ号井身的套管柱结构进行了优化设计,并开发了配套的Ф206.38mmx17.25mm BG140V BGT2的非API规格高强度、高韧性、高气密性套管。优化设计后的生产套管柱既能满足高关井压力要求,也可满足钻机大钩悬重要求。评价试验表明,新设计开发的Ф206.38mmx17.25mmBG140VBGT2套管可以满足克深气田新勘探区块的复杂使用工况要求。套管材料的韧脆转变温度低于-74℃,确保了在-38℃极限环境温度下的施工和采气生产安全。 展开更多
关键词 石油套管 套管柱结构 高气密封 精确轧制 优化设计
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Exhaust Ventilation through a Solar Chimney: A Response to High Hermeticity in Welfare Housing
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作者 Marcos Eduardo Gonzalez-Trevizo Adolfo Gomez-Amador +2 位作者 Anibal Luna-Leon Carlos Escobar-Del POZO Carlos Javier Esparza Lopez 《Journal of Civil Engineering and Architecture》 2015年第7期767-774,共8页
This research reports on potentiality in the solar chimney as an exhaust ventilation device through a hypothetical statement that convenient weather conditions exist on sub-humid warm climate to enhance the performanc... This research reports on potentiality in the solar chimney as an exhaust ventilation device through a hypothetical statement that convenient weather conditions exist on sub-humid warm climate to enhance the performance ofa SC (solar chimney), in order to increase ventilation to dissipate metabolic heat from inhabitants of airtight buildings. The methodology used in this research integrates the use of simplified mathematical models that predict in a semi-empirical way a potential volume flow through estimation of kinetic power generation, by natural circulation and stack effect in a typical covered-plate air solar collector. The study was carried out during the warm month of April, an important warm season for Colima, where the prevailing wind is about 6.8 m/s, the average temperature of maximums and minimums oscillates between 15.4℃and 34.4 ℃ with average relative humidity of 65% according to national weather service. A scale model of the SC was installed on environmental chambers. The results showed that this device is capable of generating ventilation conditions around light breeze parameters near between 0.6 m/s and 1.5 m/s width, a better performance at day in 45% approximately than the night values, making ventilation rates up 0.24 ACH (air changes per hour) as average air change rate. 展开更多
关键词 Exhaust ventilation solar chimney air solar collector welfare housing.
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