A high-throughput multi-plume pulsed-laser deposition （MPPLD） system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsedlaser deposition （PLD） systems have focused on achie...A high-throughput multi-plume pulsed-laser deposition （MPPLD） system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsedlaser deposition （PLD） systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-film fabrication.展开更多
基金partially supported by the US Department of Energy
文摘A high-throughput multi-plume pulsed-laser deposition （MPPLD） system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsedlaser deposition （PLD） systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-film fabrication.
