Hydrogen-free diamond-like carbon （DLC） thin films were deposited at low temperature （less than 100~C） by an RF magne- tron sputtering facility. DLC films have the ability to change the sound velocity （E/p） in l...Hydrogen-free diamond-like carbon （DLC） thin films were deposited at low temperature （less than 100~C） by an RF magne- tron sputtering facility. DLC films have the ability to change the sound velocity （E/p） in loudspeakers for applications of hard coating. The hydrogen-free DLC films were coated onto PEI diaphragm substrates. The ID/IG ratio and the surface roughness are 2.09 and less than 0.86 nm （Ra） with a scanning area of 50 um x 50 um, respectively. Frequency response analysis of the DLC films on the diaphragm shows that the high frequency response increases by 0.2 dB-5.1 dB （6 kHz-ll.2 kHz）, -0.4 dB-1.8 dB （11.8 kHz-20 kHz） on average. On the basis of the results of this study, we validated that it was feasible to sputter hydrogen-free DLC films on polymer substrates for mass production. These results also provided useful parameters for future applications of electro-acoustic devices.展开更多
文摘Hydrogen-free diamond-like carbon （DLC） thin films were deposited at low temperature （less than 100~C） by an RF magne- tron sputtering facility. DLC films have the ability to change the sound velocity （E/p） in loudspeakers for applications of hard coating. The hydrogen-free DLC films were coated onto PEI diaphragm substrates. The ID/IG ratio and the surface roughness are 2.09 and less than 0.86 nm （Ra） with a scanning area of 50 um x 50 um, respectively. Frequency response analysis of the DLC films on the diaphragm shows that the high frequency response increases by 0.2 dB-5.1 dB （6 kHz-ll.2 kHz）, -0.4 dB-1.8 dB （11.8 kHz-20 kHz） on average. On the basis of the results of this study, we validated that it was feasible to sputter hydrogen-free DLC films on polymer substrates for mass production. These results also provided useful parameters for future applications of electro-acoustic devices.
