Two kinds of clamping in micro/nano scale experiments are investigated in this paper, one based on electron-beam-induced deposition, and the other on the van der Waals interaction. The clamping strength and mechanism ...Two kinds of clamping in micro/nano scale experiments are investigated in this paper, one based on electron-beam-induced deposition, and the other on the van der Waals interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of relative humidity on the micro/nano clamping and the method of electrostatic clamping are discussed. The clamping strength and performance of different clamping methods are compared considering the size and material of the clamped objects, and the application environments.展开更多
基金supported by the NSFC (Nos10972113,10572071 and 10732080)the National Basic Research Program of China (Nos2007CB936803 and 2010CB631005)the SRFDP (No20070003053) and the Central Laboratory of Strength and Vibration of Tsinghua University
文摘Two kinds of clamping in micro/nano scale experiments are investigated in this paper, one based on electron-beam-induced deposition, and the other on the van der Waals interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of relative humidity on the micro/nano clamping and the method of electrostatic clamping are discussed. The clamping strength and performance of different clamping methods are compared considering the size and material of the clamped objects, and the application environments.
